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Manufacture method of distributed feedback laser for restraining space hole-burning effect

A distributed feedback and spatial hole-burning technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problems of high price, harsh and complex grating process requirements, suppress the spatial hole-burning effect, and improve single-mode stability. , the effect of reducing production costs

Inactive Publication Date: 2012-12-12
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

Although these methods of modulating the period or shape of the grating are effective, since the grating in the modulation area is very different from other parts, the requirements for the grating manufacturing process are quite strict, and the actual manufacturing is difficult and the manufacturing process is complicated and the efficiency is low. ,expensive

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  • Manufacture method of distributed feedback laser for restraining space hole-burning effect
  • Manufacture method of distributed feedback laser for restraining space hole-burning effect
  • Manufacture method of distributed feedback laser for restraining space hole-burning effect

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Embodiment

[0043] please refer again figure 1 , and combined with reference to shown in Figure 2, a method for manufacturing a distributed feedback laser that suppresses the spatial hole-burning effect on an n-type InP substrate includes the following steps:

[0044] Select an n-type (100) plane InP substrate 1 with a doping concentration of 5×10 17 -5×10 18 cm -3 ; Utilize conventional plasma-enhanced vapor deposition method to grow SiO with a thickness of 30-300nm on the substrate 1 2 or Si 3 N 4 For the dielectric mask, the dielectric mask pattern 2 is formed on the surface of the dielectric mask by using conventional mask photolithography technology, wherein the dielectric mask pattern 2 appears in pairs, and the width of the mask strip in the middle section is greater than that of the mask strips on both sides. width;

[0045] growing the lower waveguide layer 31, the InGaAsP core layer 32 and the upper waveguide layer 33 sequentially on the substrate 1 with the dielectric mas...

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Abstract

The invention provides a manufacture method of a distributed feedback laser for restraining a space hole-burning effect, which comprises the steps of: 1. selecting a substrate; 2. sequentially growing two medium masks on the substrate, resist coating, photoetching, and forming a medium mask pattern between the two medium masks, wherein a growth window is formed between the two medium masks; 3. manufacturing a multiple quantum well active area at an epitaxy on the substrate 1 which is provided with the medium mask pattern; 4. manufacturing an even raster on the surface layer of the multiple quantum well active area; 5. removing the medium masks in a corroding way, and growing a growth package layer and an electric contact layer on the even raster; 6. resist coating and photoetching on the electric contact layer; 7. manufacturing a ridgelet guide structure on the electric contact layer by means of wet etching; 8. manufacturing a front-side electrode at the top end of the ridgelet guide structure; and 9. manufacturing a back-side electrode at the bottom of the substrate after the thickness of the substrate is reduced so as to manufacture the distributed feedback laser.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a method for manufacturing a distributed feedback laser that suppresses the spatial hole-burning effect. Background technique [0002] High power, single longitudinal mode, narrow linewidth distributed feedback (DFB) laser is the core device of modern optical fiber communication technology. In order to improve its single-mode yield, a λ / 4 phase shift is introduced in the center of the cavity, but due to the introduction of the phase shift structure, the optical field distribution of the λ / 4 phase shift structure laser is discontinuous in the center of the cavity, and appears in the center The sharp peak, the high concentration of the optical field in the center leads to a large consumption of carriers here, resulting in a spatial hole burning effect. This changes the intensity and phase of the optical feedback in the resonator, causing the fluctuation of the gain spectrum, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/12H01S5/323H01S5/22
Inventor 张灿梁松朱洪亮马丽
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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