A kind of micro generator and its preparation method

Abstract

The invention provides a miniature generator which comprises an electrode collection structure, an electret structure and micro-balls used as bearings arranged between the electrode collection structure and the electret structure, wherein the electrode collection structure comprises a substrate, a plurality of metal electrode pairs arranged on the substrate and insulated with the substrate, and a deep slot arranged on the substrate and vertically distributed with the metal electrode pairs; the electret structure comprises a substrate, electret strips arranged on the substrate and distributed in parallel at intervals in strip shapes, and a deep slot arranged on the substrate and vertically distributed with the electret strips; the deep slot on the electrode collection structure and the deep slot on the electret structure are arranged oppositely; the micro-balls are arranged in the opposite deep slots; and the electret strips are parallel to the electrode strips. In the invention, the micro-balls are used as bearing supports, and the space between the metal electrode and the electret can be controlled through the depth or the width of the slot, thus, the output power of the miniature generator can be favorably increased.

Description

technical field [0001] The invention relates to the technical field of microelectronics, and relates to an electret type micro generator and a preparation method thereof. Background technique [0002] Micro-Electro-Mechanical Systems (hereinafter referred to as MEMS) technology is based on the design and manufacturing technology in the micron / nano scale, integrating micro-sensors, micro-actuators and signal processing / control circuits to interfaces, communications and power supplies. Modules or systems have broad application prospects in the fields of biomedicine, national defense, precision instruments, and micro-robots. MEMS can complete tasks that traditional electromechanical systems are difficult to complete in the range of micron / nanoscale, making it possible to miniaturize various systems, and raising their automation, intelligence and reliability to a new level. The service life of a MEMS system does not entirely depend on the life and reliability of each component,...

AI Technical Summary

Problems solved by technology

The disadvantages of this structure include: 1) The operating bandwidth is relatively narrow, and higher energy can only be picked up at the resonance frequency, while the vibration frequency bandwidth of the surrounding environment is generally very wide, so the energy conversion efficiency is low

2) The resonance frequency of this type of micro-generator is usually relatively high (greater than 100Hz), while the vibration frequency in the environment is generally lower than 100Hz, usually only a few Hz, the application environment is limited, and can only be used in environments with high-frequency characteristics

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