Contact lens type flexible microelectrode for recovery of facial paralysis
A contact lens and micro-electrode technology, applied in the direction of electrodes, artificial respiration, physical therapy, etc., to achieve the effect of easy wearing and simple structure
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[0027] The specific preparation process of this embodiment is as follows: first deposit a 3 μm-5 μm polychlorinated p-xylylene (Parylene-C) film on the Si wafer, and then throw 0.01mm-1mm polydimethylsiloxane (PDMS), 80 Dry at ℃ for 4 hours to form the structure layer of the contact lens. Then throw 5μm positive resist and pattern it, sputter noble metal (including Pt, Ir, Au, etc.) seed layer, 100-15000 Angstroms, use Lift-off process to remove photoresist, pattern the seed layer, and form the electrode circuit layer. Then, throw 0.01mm-1mm PDMS, dry at 80°C for 4 hours, then deposit 3μm-5μm Parylene-C, pattern the photoresist for the second time, and use reactive ion etching (RIE) to remove Parylene-C Cut through to expose the electrode points that form the contact lens overlay. Finally, it is cut into the contact lens structure using a precision machine tool, and can also be molded into the contact lens structure.
[0028] Such as Figure 1-Figure 3 As shown, the contact...
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