Energy dispersion X ray fluorescence spectrometer

Abstract

The invention discloses an energy dispersion X ray fluorescence spectrometer, which comprises an object stage, an X ray generating device, a detector, a control system and a secondary target stage, wherein the object stage is used for bearing a sample; the X ray generating device is used for emitting primary X rays; the detector is used for detecting fluorescent light generated by the sample under the irradiation of X rays; the control system is used for receiving the fluorescent light generated by the sample and detected by the detector and analyzing the elements and element contents in the sample; the secondary target stage is used for accommodating a secondary target material; and secondary X rays generated by the secondary target material under the irradiation of primary X rays are irradiated to the sample. The primary X rays generated by the X ray generating device are used for irradiating the secondary target material and a single-color excitation source generated by the secondary target material under the irradiation of the primary X rays is used for irradiating the sample, so that low-content elements in the sample can be detected, high-content and low-content elements in the sample can be tested through one-time measurement by using the same instrument, and the testing accuracy and efficiency are greatly improved.

Description

technical field [0001] The invention relates to the field of fluorescence spectrometers, in particular to an energy dispersive X-ray fluorescence spectrometer. Background technique [0002] X-ray fluorescence spectrometer is a kind of ray analysis instrument, which is a common form of X-ray analysis instrument. X-rays use high-speed electrons to bombard the inner electrons of atoms, making them in a highly excited state, and at the same time, the outer electrons jump to the inner orbits that lack electrons; during this process, energy is released in the form of electromagnetic waves. The electromagnetic waves that release energy have high energy and small wavelength, which are invisible to the naked eye, and are called X-rays. [0003] If the X-rays generated by high-speed electron excitation are used as an excitation source (called primary X-rays) to bombard the inner electrons of other atoms, X-rays can also be generated, but the energy of this X-ray is lower than that of...

AI Technical Summary

Problems solved by technology

[0009] The technical problem solved by the present invention is the shortcoming that the energy dispersive X-ray fluorescence spectrometer in the prior art cannot detect low content elements and their content

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