Method for preparing large-scale two-dimensional nanomaterial graphite
A two-dimensional nanomaterial, large-scale technology, applied in the preparation of two-dimensional nanomaterial graphene, using carbon element injection to prepare large-scale graphene, achieving large size, saving development and equipment costs, and large size effects
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Embodiment 1
[0024] Embodiment 1: implement according to the following five steps
[0025] 1. Nickel thin film preparation: use sputtering method (Sputtering) to coat a uniform nickel thin film on the surface of a single crystal silicon wafer (0.7mm thick), with a thickness of 300nm.
[0026] 2. Carbon element implantation: The carbon element is implanted into the nickel film by means of ion implantation. The ion implantation energy is 600eV, and the dose is 5x10 15 cm -2 ,
[0027] 3. High-temperature annealing: put the sample injected with carbon into a high-temperature furnace for annealing, and the annealing temperature is 900 o C, the annealing time is 30 minutes, the vacuum degree is 10 -5 Pa. And after cooling down to room temperature. At this point, a layer of graphene film will grow on the surface of the nickel film,
[0028] 4. Corrosion of nickel film: put the substrate with graphene film on the surface into ferric chloride solution for corrosion, the solution concentrat...
Embodiment 2
[0031] Embodiment 2: one, nickel thin film preparation: utilize sputtering method (Sputtering) to coat uniform nickel thin film on the surface of monocrystalline silicon chip (0.7 mm thick), thickness is 300nm,
[0032] 2. Carbon element implantation: The carbon element is implanted into the nickel film by means of ion implantation. The ion implantation energy is 1000 eV, and the metering is 10 16 cm -2 ,
[0033] 3. High-temperature annealing: put the sample injected with carbon into a high-temperature furnace for annealing, and the annealing temperature is 800 o C, the annealing time is 45 minutes, and the vacuum degree is 1Pa. And after cooling down to room temperature. At this point, a layer of graphene film will grow on the surface of the nickel film,
[0034] 4. Corrosion of nickel film: put the substrate with graphene film on the surface into ferric chloride solution for corrosion, the solution concentration is 1 mol / liter, and the corrosion time is 10 hours. At ...
Embodiment 3
[0037] 1. Nickel thin film preparation: use sputtering method (Sputtering) to coat a uniform nickel thin film on the surface of a single crystal silicon wafer (0.7 mm thick), with a thickness of 200nm.
[0038] 2. Carbon element implantation: The carbon element is implanted into the nickel film by means of ion implantation. The energy of ion implantation is 600eV, and the metering is 5x10 15 cm -2 ,
[0039] 3. High-temperature annealing: put the sample injected with carbon into a high-temperature furnace for annealing, and the annealing temperature is 1000o C, the annealing time is 15 minutes, the vacuum degree is 10 -5 Pa. And after cooling down to room temperature. At this point, a layer of graphene film will grow on the surface of the nickel film,
[0040] 4. Corrosion of nickel film: put the substrate with graphene film on the surface into ferric chloride solution for corrosion, the solution concentration is 0.5 mol / liter, and the corrosion time is 24 hours. At thi...
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