Magnetic multilayer film as well as magnetic logic element and magnetic random access memory thereof
A multi-layer film and magnetic technology, applied in the direction of magnetic layer, static memory, digital memory information, etc., can solve the problems of low signal-to-noise ratio, high operating current density, etc., achieve high signal-to-noise ratio, low current density, and save energy Effect
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[0046] According to one embodiment of the present invention, it is provided as figure 1 The magnetic multilayer film of the magnetic logic element shown, the magnetic multilayer film includes from bottom to top: the first antiferromagnetic layer AFM1 at the bottom; the first magnetic layer FM1 (hard magnetic layer) formed on the AFM1 layer); the first non-magnetic metal layer NM1 formed on the FM1 magnetic layer; the second magnetic layer FM2 (soft magnetic layer) formed on the first non-magnetic metal layer; formed on the first The tunnel barrier layer I1 on the two magnetic layers; the third magnetic layer FM3 (soft magnetic layer) formed on the first tunnel barrier layer; the second non-magnetic layer formed on the third magnetic layer A magnetic metal layer NM2; a fourth magnetic layer FM4 (hard magnetic layer) formed over the second nonmagnetic metal layer; a second antiferromagnetic layer AFM2 formed over the fourth magnetic layer. Among them, the magnetic layers FM1 an...
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