SAW (Surface Acoustic Wave) device of bus bar doubled as reflecting grating type IDT (Interdigital Transducer) structure
A technology of bus bars and reflection grids, applied in electrical components, impedance networks, etc., can solve the problems of large insertion loss, poor side lobe suppression, and unsatisfactory waveform band steepness, and achieve the effect of reducing the die area.
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Embodiment 1
[0030] Embodiment 1. The structure of the triangular IDT die in which the bus bar doubles as a reflective grid is as follows: Figure 4 As shown, the mark 1 in the figure indicates that the figure in the dotted line box is an IDT in which the bus bar doubles as a reflective grid (and is also a part of the die structure); the mark 2 in the figure represents the input IDT; the mark in the figure 3 represents the output interdigital transducer; the mark 4 in the figure represents the structural diagram in the dotted line frame, and the IDT of the triangular structure of the bus bar of the present invention doubles as the reflective grid is etched on the surface of the piezoelectric substrate or piezoelectric film and made The core of the surface acoustic wave filter (or surface acoustic wave resonator) (the packaging shell, layout and the outline of the piezoelectric substrate or piezoelectric film are not drawn). The width of the interdigitated electrodes is a, the electrode int...
Embodiment 2
[0032] Embodiment 2, the structure of the circular IDT tube core in which the bus bar doubles as a reflective grid is as follows: Figure 7 As shown, the mark 1 in the figure indicates that the figure in the dotted line box is an IDT in which the bus bar doubles as a reflective grid (and is also a part of the die structure); the mark 2 in the figure represents the input IDT; the mark in the figure 3 represents the output interdigital transducer; the mark 4 in the figure represents the structural diagram in the dotted line frame, and the IDT of the circular structure that the bus bar of the present invention doubles as the reflection grid is etched on the surface of the piezoelectric substrate or piezoelectric film and made The tube core of the surface acoustic wave filter (or surface acoustic wave resonator) (the packaging shell, layout and the outline of the piezoelectric substrate or piezoelectric film are not drawn). The width of the interdigitated electrodes is a, the elec...
Embodiment 3
[0033] Embodiment 3, the structure of the elliptical IDT tube core in which the bus bar doubles as a reflection grid is as follows: Figure 10 As shown, the mark 1 in the figure indicates that the figure in the dotted line box is an IDT in which the bus bar doubles as a reflection grid (and is also a part of the die structure); the mark 2 in the figure indicates that the bus bar doubles as an elliptical input finger of the reflection grid Transducer; Mark 3 in the figure represents the elliptical output interdigital transducer that bus bar doubles as reflection grid; Mark 4 in the figure represents the structural figure in the dotted line frame is that bus bar of the present invention doubles as the elliptical structure of reflection grid The IDT is etched on the surface of the piezoelectric substrate (or piezoelectric film) and the core of the surface acoustic wave filter or the surface acoustic wave resonator (packaging shell, layout and the wheel of the piezoelectric substra...
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