Piezoelectric twin-wafer type MEMS energy collector and preparation method thereof

Abstract

The invention relates to a piezoelectric twin-wafer type MEMS energy collector and a preparation method thereof, which belong to the technical field of micro electromechanics. The piezoelectric twin-wafer type MEMS energy collector comprises a plurality of piezoelectric twin-wafer cantilever beams, wherein each piezoelectric twin-wafer cantilever beam comprises a silicon immobilizing base, a piezoelectric twin wafer and mass blocks, wherein the piezoelectric twin wafer comprises a metal base chip, a two-layer piezoelectric thin film and a two-layer electrode. The method comprises the following steps: using a pulling method for attaching the piezoelectric film to the upper surface and the lower surface of the metal base chip; sputtering or evaporating a layer of metal materials on the piezoelectric film to obtain the piezoelectric twin wafer; pasting the piezoelectric twin wafer on the upper surface of the silicon chip; forming a rectangular groove on the lower surface of the silicon chip; cutting the silicon chip and the piezoelectric twin wafer; preparing a plurality of mass blocks; pasting the mass blocks on the suspended end of the piezoelectric twin wafer; and polarizing the piezoelectric twin wafer. The invention has high conversation efficiency, high output power and simple and reliable manufacture, and has wide application prospects in the design and the manufacture of wireless sensor network nodes.

Description

technical field [0001] The invention relates to a device in the field of micro-electro-mechanical technology and a preparation method thereof, in particular to a piezoelectric bimorph MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) energy harvester and a preparation method thereof. Background technique [0002] Sensor / driver network, embedded system, RFID (radio frequency identification), wireless communication and other technologies are developing rapidly. The development of these technologies requires that the power supply parts of the corresponding components have the characteristics of small size, long life, no need to be replaced, and unattended. Although the energy storage density and service life of batteries have been continuously improved, traditional batteries still have some irreversible energy supply defects: large volume, heavy mass, limited energy supply life, and repeated charging when energy is exhausted. The MEMS micro-energy that c...

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Problems solved by technology

[0002] Sensor / driver network, embedded system, RFID (radio frequency identification), wireless communication and other technologies are developing rapidly. The development of these technologies requires that the power supply parts of the corresponding components have the characteristics of small size, long life, no need to be replaced, and unattended. Although the energy storage density and service life of batteries have been continuously improved, traditional batteries still have some unchangeable energy supply defects: large volume, high quality, limited energy supply life, and repeated charging when energy is exhausted.

This paper compares the output power of two types of bimorph energy harvesters and single crystal energy harvesters, but the paper mainly makes theoretical analysis, and the bimorph structure involved is a device in the macroscopic sense, and MEMS piezoelectric bimorphs are not given. Device Fabrication Method

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