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Array substrate, manufacturing method thereof and wide-viewing angle liquid crystal display

A technology of array substrate and substrate substrate, which is applied in semiconductor/solid-state device manufacturing, instruments, electric solid-state devices, etc., can solve the problems of increasing equipment investment, and achieve the effects of small equipment investment, reduction of storage capacitance, and cost reduction.

Active Publication Date: 2010-09-29
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the increase in the thickness of the passivation layer requires an increase in the number of plasma-enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition; hereinafter referred to as: PECVD) equipment and dry etching equipment to ensure the process matching of the production line, thus resulting in a substantial increase in equipment investment

Method used

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  • Array substrate, manufacturing method thereof and wide-viewing angle liquid crystal display
  • Array substrate, manufacturing method thereof and wide-viewing angle liquid crystal display
  • Array substrate, manufacturing method thereof and wide-viewing angle liquid crystal display

Examples

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no. 1 example

[0034] image 3 It is a schematic cross-sectional structure diagram of the array substrate provided by the first embodiment of the present invention, and its partial top view structure schematic diagram can be found in figure 1 As shown (the gate insulating layer, passivation layer and organic transparent insulating layer are not shown in the plan view herein). The array substrate is specifically an array substrate in an FFS mode liquid crystal display, such as image 3 As shown, its specific structure includes: a base substrate 1, usually made of glass; a plurality of data lines 3 and gate lines 2 crossing each other are formed on the base substrate 1, and the data lines 3 and gate lines 2 define a A plurality of pixel areas arranged in matrix form; each pixel area includes common electrode lines 20, common electrodes 5, TFT switches, passivation layers 11 and pixel electrodes 13, and each pixel area is covered with a whole block of common electrodes 5. Corresponding to the...

no. 2 example

[0048] Figure 4 It is a flow chart of the manufacturing method of the array substrate provided by the second embodiment of the present invention, and the method specifically includes the following steps:

[0049] Step 100, using a patterning process on the base substrate to form patterns of common electrodes, common electrode lines, and TFT switches;

[0050] Step 200, a passivation layer may be deposited on the above-mentioned base substrate by PECVD method;

[0051] Step 300, forming an organic transparent insulating layer on the passivation layer, and using a patterning process to etch on the organic transparent insulating layer to form organic layer via holes, and simultaneously etch the passivation layer to form passivation layer via holes, the organic layer The via hole completely overlaps the passivation layer via hole;

[0052] Step 400, deposit a transparent conductive film layer on the organic transparent insulating layer, and use a patterning process to etch to f...

no. 3 example

[0055] Figure 5 It is a flow chart of the manufacturing method of the array substrate provided by the third embodiment of the present invention, and the method specifically includes the following steps:

[0056] Step 100, using a patterning process on the base substrate 1 to form the patterns of the common electrode 5, the common electrode line 20 and the thin film transistor switch;

[0057] A specific implementation of step 100 is as follows:

[0058] Step 101a, deposit a transparent conductive film layer on the base substrate 1, and use a patterning process to etch to form a pattern of the common electrode 5, such as Figure 6 and Figure 7 shown;

[0059] Step 102a, deposit a gate metal layer on the above-mentioned substrate 1, and use a patterning process to etch to form the pattern of the common electrode line 20, the gate line 2 and the gate electrode 4, as Figure 8 and Figure 9 shown;

[0060] Step 103a, depositing a gate insulating layer 6 on the above-mentio...

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Abstract

The invention relates to an array substrate, a manufacturing method thereof and a wide-viewing angle liquid crystal display. The array substrate comprises a substrate, a plurality of pixel areas and an organic transparent insulating layer, wherein the organic transparent insulating layer is formed between a passivation layer and a pixel electrode. The manufacturing method comprises the following steps of: forming a public electrode, a public electrode wire and patterns of a thin film transistor switch on the substrate; depositing the passivation layer; forming the organic transparent insulating layer, an organic layer via hole and a passivation layer via hole on the passivation layer; and forming patterns of the pixel electrode on the organic transparent insulating layer, wherein a plurality of gaps are formed on the patterns of the pixel electrode, and the pixel electrode is connected with the thin film transistor switch through the organic layer via hole and the passivation layer via hole. A liquid crystal display of the invention comprises the array substrate. In the array substrate, the technical means of adding the organic transparent insulating layer between the pixel electrode and the passivation layer is adopted to increase the thickness of film layers between the pixel electrode and the public electrode, so that the storage capacitance and residual images can be reduced effectively.

Description

technical field [0001] The invention relates to liquid crystal display technology, in particular to an array substrate, a manufacturing method thereof, and a wide viewing angle liquid crystal display. Background technique [0002] The market of liquid crystal display is growing rapidly, and the application fields are continuously expanding, especially the application of large-size liquid crystal TV, which requires the liquid crystal display to have a wide range of viewing angles. The main part of the liquid crystal display, the liquid crystal panel, includes an array substrate and a color filter substrate arranged in opposite cells, and a liquid crystal layer is arranged between them. The liquid crystal molecules are deflected under the action of the voltage, and the degree of deflection of the liquid crystal molecules can be controlled by controlling the magnitude of the voltage, so as to achieve the purpose of adjusting the transmittance, that is, adjusting the gray scale ...

Claims

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Application Information

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IPC IPC(8): H01L27/12H01L23/522H01L21/84H01L21/768G02F1/1362G02F1/1333
Inventor 邵喜斌齐悦张丽蕾金哲雄
Owner BOE TECH GRP CO LTD
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