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Excimer lamp

An excimer lamp, a part of the technology, is applied in the field of excimer lamps for lighting openings, which can solve the problems of inability to correctly measure the amount of light, obstruction of creeping discharge 12, etc., and achieve the effect of easy formation and easy lighting openings

Inactive Publication Date: 2010-09-29
USHIO DENKI KK
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  • Abstract
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  • Application Information

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Problems solved by technology

[0021] However, as described above, the creeping discharge 12 also occurs during normal lighting except when the excimer lamp is started, so that the creeping discharge 12 is also discharged to the lighting for light monitoring provided near the end of the discharge vessel 11. 5, which is mixed with the excimer light that should be monitored from the lighting port 5, so that the creeping discharge 12 becomes an obstacle, and there is a problem that the amount of light emitted from the excimer lamp cannot be accurately measured.

Method used

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Embodiment Construction

[0032] figure 1 It is a schematic diagram showing the first embodiment of the excimer lamp of the present invention, figure 1 (a) is a top view, and figure 1 (b) is its B-B section view.

[0033] In the figure, on the monolithic electrode (べタ-shaped electrode) 3 formed at the end of the light-transmitting electrode 2, there are integrally formed electrodes extending in the direction opposite to the direction of the light-transmitting electrode in the direction of the tube axis at its upper and lower ends. Dendritic electrodes 8,8.

[0034] In addition, on the inner surface of the discharge vessel 11 corresponding to the portion where the dendritic electrode 8 is formed, the starting auxiliary electrode 6 is formed so as to overlap a part thereof. For other structures, with image 3 Same as shown.

[0035] The dendritic electrodes 8, 8 have the effect of increasing the distance L between the lighting opening 5 and the starting auxiliary electrode 6, so even if the lighti...

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Abstract

Provided is an excimer lamp, an integral electrode is formed at the end of a pair of light transmission electrodes, a starting auxiliary electrode is formed at the inner surface of the discharging container, a reflection film is formed at the inner surface at one non-light output side of the discharging container, a daylight opening for light monitoring is formed at the end of the reflection film, characterized in that a branch-shaped electrode extending along the pipe shaft is formed on the integral electrode, one part of starting auxiliary electrode is overlapped with the branch-shaped electrode, thus the excimer lamp is discharged on the surface from the starting auxiliary electrode to the integral electrode with on influence on the daylight opening, and can correctly perform the light monitoring.

Description

technical field [0001] The present invention relates to an excimer lamp in which a reflective film is formed in a discharge vessel, in particular to an excimer lamp with a monitoring daylight opening which is suitable for installing a light quantity monitoring device. Background technique [0002] As conventional excimer lamps, various shapes such as a double tube type, a cylindrical type, and a square type have been proposed. These excimer lamps are expected to have high output regardless of their shape. An excimer lamp in which a reflective film is formed in a discharge vessel is known as a technique for achieving such high output, as shown in JP-A-2007-335350, for example. [0003] According to this prior art, on the inner surface of a discharge vessel such as a square excimer lamp, a reflective film formed of fine particles mainly composed of silica that reflects ultraviolet light is formed on a portion other than the light emitting surface. In addition, a pair of exte...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/04
Inventor 竹添法隆
Owner USHIO DENKI KK
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