X-band three-digital MEMS(Micro Electric Mechanical System) tunable band-pass filter
A filter and X-band technology, applied in the field of electronic science, which can solve the problems of large pull-down voltage, uncompact structure, and insufficient Q value.
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[0041] An X-band three-bit MEMS tunable filter, such as figure 1 , 2 As shown, including two input or output ports integrated on the same chip, two matching capacitor networks C M and two LC resonators; the first input or output port passes through the first matching capacitor network C M Connected to the first LC resonator; the second input or output port passes through the second matching capacitor network C M It is connected with the second LC resonator; the first LC resonator is coupled and connected with the second LC resonator; the whole filter has a mirror symmetrical structure relative to the coupling center line of the two LC resonators.
[0042] The input or output port is a gradual microstrip line.
[0043] The LC resonator consists of a square microstrip split ring and a resonant capacitor network C L Composition; Among them, one end of the square microstrip split ring is connected with the matching capacitor network C in the horizontal direction M Connected, ...
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