Color organic light emitting display panel and manufacturing method thereof

A light-emitting display, organic technology, used in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., to achieve the effect of improving injection capacity, high recombination efficiency, and prolonging life

Inactive Publication Date: 2010-07-14
IRICO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] So far, although the development of OLED is relatively mature, there are still many unsatisfactory places in practical applications.

Method used

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  • Color organic light emitting display panel and manufacturing method thereof
  • Color organic light emitting display panel and manufacturing method thereof
  • Color organic light emitting display panel and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A color organic light-emitting display (OLED) panel and a preparation method thereof, the preparation method of which is as follows:

[0040] 1) Get a piece of ITO glass substrate 1 (this ITO glass substrate 1 comprises lower substrate glass 100 and the lower substrate ITO 101 covered on the lower substrate glass 100) cleaning, drying, then use it as the lower substrate, on the lower substrate of the lower substrate glass 100 Sputter a layer of 0.5nm Al 102 on the ITO 101, and then sputter a layer of 1nm Ni 103 metal layer, and then perform laser annealing. The annealing temperature is 850°C and the annealing time is 38s;

[0041] Such as figure 1 As shown, this step can obtain the best metal contact electrode, improve electrical conductivity, and reduce its contact resistance;

[0042] 2) Then apply photoresist on the glass substrate sputtered with Al / Ni, pre-bake it on a hot plate at 140°C for 3min, expose it for 50s, and use 0.5% NaCO 3 Develop, wash, dry, and bak...

Embodiment 2

[0064] A color organic light-emitting display (OLED) panel and a preparation method thereof, the preparation method of which is as follows:

[0065] 1) Get a piece of ITO glass substrate 1 to clean and dry, then use it as the lower substrate, sputter a layer of Al102 with a thickness of 1nm on the lower substrate ITO101 of the cover layer of the lower substrate glass 100, and then sputter a layer of Ni with a thickness of 2nm 103 metal layer, and then perform laser annealing, the annealing temperature is 850°C, and the annealing time is 38s;

[0066] 2) Then apply photoresist on the glass substrate sputtered with Al / Ni, pre-bake it on a hot plate at 145°C for 3.5min, expose it for 50s, and use 0.5% NaCO 3 Develop, wash, dry, and bake at 155°C for 5 minutes; then etch the lower substrate with ITO / Al / Ni, and use HCl:HNO 3 :H 2 o 2 = 5:5:2 etching solution to carve out the metal anode pattern; thereby completing the production of the lower substrate anode pattern;

[0067] 3)...

Embodiment 3

[0075] A color organic light-emitting display (OLED) panel and a preparation method thereof, the preparation method of which is as follows:

[0076] 1) Get a piece of ITO glass substrate 1 to clean and dry, and then use it as the lower substrate to first sputter a layer of Al 102 with a thickness of 0.8nm on the lower substrate ITO101 of the cover layer of the lower substrate glass 100, and then sputter a layer with a thickness of 1.5nm Ni 103 metal layer, followed by laser annealing, the annealing temperature is 850°C, and the annealing time is 38s;

[0077] 2) Then apply photoresist on the glass substrate sputtered with Al / Ni, pre-bake it on a hot plate at 150°C for 3.5min, expose for 50s, and use 0.5% NaCO 3 Develop, wash, dry, and bake at 160°C for 5 minutes; then etch the lower substrate with ITO / Al / Ni, and use HCl:HNO 3 :H 2 o 2 = 5:5:2 etching solution to carve out the metal anode pattern; thereby completing the production of the lower substrate anode pattern;

[00...

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Abstract

The invention relates to a color organic light emitting display panel and a manufacturing method thereof. The manufacturing method is as follows: 1) cleaning and drying bottom substrate glass, sputtering two metal layers on bottom substrate ITO, and annealing by laser; 2) coating photoresist, exposing, developing, cleansing, drying, and etching out an anode pattern; 3) cleaning and drying upper substrate glass, coating photoresist on upper substrate ITO, prebaking, exposing, developing, cleansing, drying, baking, and etching out a metal cathode pattern on upper substrate ITO by etching liquor; 4) spin-coating the bottom substrate glass, baking, exposing, developing, washing, drying, baking again and curing to obtain an insulation column; 5) evaporating various organic pixel layers on the bottom substrate glass; 6) carrying out vacuum aligning gluing on the bottom substrate glass and the upper substrate glass; and 7) carrying out vacuum lamination on a glued display panel, curing by irradiation of an ultraviolet lamp to obtain the color organic light emitting display panel. The method can effectively improve the service life and light-extraction efficiency of a device, reduce loss of light power source and save working procedures.

Description

technical field [0001] The invention belongs to the technical field of preparation of organic light emitting display panels, in particular to a color organic light emitting display (OLED) panel and a preparation method thereof. Background technique [0002] Today, with the development of multimedia technology and the advent of the information society, the performance requirements of flat panel displays are getting higher and higher. In recent years, three new display technologies: plasma display, field emission display and organic electroluminescent display have made up for the shortcomings of cathode ray tubes and liquid crystal displays to a certain extent. [0003] Among them, OLED (Organic Light Emitting Display) has a series of advantages such as self-luminescence, low-voltage DC drive, full curing, wide viewing angle, and rich colors. Compared with liquid crystal displays, OLEDs are not It requires a backlight source, has a large viewing angle and low power, and its r...

Claims

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Application Information

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IPC IPC(8): H01L27/32H01L51/56H01L51/52
Inventor 李俊
Owner IRICO
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