Integrative ultrasonic spray pyrolysis large-area wide-temperature zone coating device

Abstract

The invention discloses an integrative ultrasonic spray pyrolysis large-area wide-temperature zone coating device, comprising a frame, an air tank and an infusion pump arranged on the frame. A three-dimensional motion mechanism and a control module for controlling the three-dimensional motion mechanism to do three-dimensional motion are arranged above the frame. A temperature-controllable heating platform is arranged in the frame and under the three-dimensional motion mechanism. An integrative ultrasonic spray nozzle system capable of high-temperature coating is arranged between the heating platform and the three-dimensional motion mechanism and is toward the heating platform, and the infusion pump is communicated with the integrative ultrasonic spray nozzle system which is glidingly connected with the three-dimensional motion mechanism. Utilizing an integrative ultrasonic spray nozzle, the coating device solves the problems of high ultrasonic frequency, uneven gas spray and complex organization existing in the traditional ultrasonic spray mode. Utilizing a peripheral cooling gas nozzle, the coating device solves the problem that the integrative ultrasonic spray nozzle is usually used in low temperature and realizes high-temperature film formation.

Description

technical field [0001] The invention relates to the technical field of inorganic thin film preparation, in particular to a novel ultrasonic spray pyrolysis thin film preparation device. Background technique [0002] Inorganic thin films have important applications in the fields of solar photoelectricity, photothermal utilization, energy-saving coated glass, optoelectronic communication, etc. The preparation methods of inorganic thin films mainly include magnetron sputtering method, vacuum evaporation method, chemical vapor deposition method, sol-gel method, and spray pyrolysis method. The first three coating methods have the advantages of uniform and dense film layer, easy control of film thickness, strong film adhesion, etc., but there are disadvantages such as high preparation cost and complicated equipment; although the sol-gel method has the advantages of low preparation cost, However, the uniformity of the film is not ideal, and it is not convenient for continuous prod...

AI Technical Summary

Problems solved by technology

This method has problems such as high ultrasonic frequency, complex mechanism, unstable aerosol, and poor film uniformity.

Chinese invention patent 200710033036.X discloses an integrated ultrasonic atomizing nozzle, which overcomes the shortcomings of traditional ultrasonic spray devices. Its working principle is that the ultrasonic wave generated by the transducer is transmitted to the nozzle head through the horn, so that The outflowing sol is uniformly atomized on the end face of the nozzle, and then deposited into a film; compared with the traditional ultrasonic spraying method, the atomization effect is more uniform, and the ultrasonic frequency is low and the mechanism is simple

However, this integrated ultrasonic atomizing nozzle can only work at low temperature (below 130°C). Although this nozzle has the function of internal cooling, it is currently mostly used in low-temperature film-forming processes and cannot meet the needs of high-temperature film-forming

[0004] In addition, most of the existing ultrasonic spray pyrolysis devices use multiple nozzles to realize the function of large-area film formation, which has the problem that the film formation at the overlap is thicker, and the uniformity of film formation is not easy to control

[0005] In addition, there are problems such as poor substrate temperature uniformity in the current high-temperature film production process, resulting in uneven film formation and easy cracking of the substrate.

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