Vertical magnetic anisotropic multi-layer film
An anisotropic and anisotropic field technology, applied in the field of new perpendicular magnetic anisotropic multilayer films, can solve problems such as high coercive force, difficult to flip, unsuitable for reading magnetic heads or magnetic field sensors, and achieve coercive force adjustable effect
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[0007] According to the above-mentioned multilayer film composition and structure, the following 20 kinds of [Ni(x) / Co 2 MZ(y)] n Multilayer film, its characteristic is Co 2 MZ is L2 1 , B2 or A2 structure of semi-metallic Heusler alloy composition, M is Fe, Cr, Mn and other elements, Z is Al, Si, Ge, B and other elements.
[0008]
[0009] 14
[0010] As shown in the above table, the above [Ni(x) / Co 2 MZ(y)] n The multilayer films all exhibit perpendicular magnetic anisotropy. The perpendicular magnetic anisotropy field is between 5000 Oe and 10000 Oe, and the coercivity is between 10 Oe and 1000 Oe. Sample tests show that the film still maintains perpendicular magnetic anisotropy after annealing at 400°C.
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