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Bug repairing apparatus

A defect repairing and installation technology, which is applied in the field of defect repairing devices, can solve problems such as optical fiber deformation, durability decline, and inability to process substrates, and achieve the effect of a relatively short distance

Inactive Publication Date: 2014-03-12
OLYMPUS CORP
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0005] However, since the laser processing device described in the above-mentioned Patent Document 1 moves only the laser oscillator and the processing head among the processing heads separated by the optical fiber, deformation of the optical fiber occurs repeatedly as the processing head moves.
[0006] If the deformation of the optical fiber occurs repeatedly, there are problems as follows: the durability decreases, and the workpiece cannot be processed by a laser with a uniform intensity distribution due to cracks in the core wire of the optical fiber
[0007] In addition, if the deformation of the optical fiber occurs repeatedly, there is also a problem that the quality of the laser light transmitted in the optical fiber changes due to changes in the reflection conditions in the optical fiber, and the substrate cannot be processed by the laser light with a uniform intensity distribution.

Method used

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Embodiment Construction

[0045] Hereinafter, a defect repairing device according to an embodiment of the present invention will be described with reference to the drawings.

[0046] Figure 1A and Figure 1B It is a top view and a front view which show the defect repairing apparatus 1 which concerns on one Embodiment of this invention.

[0047] figure 2 It is a schematic structural diagram for explaining the internal structure of the processing head 5 of the defect repairing apparatus 1.

[0048] Figure 3A and Figure 3B It is a schematic side view and a schematic front view for explaining the optical fiber 8 and the mode scramblers 11 and 12 of the defect repairing device 1 .

[0049] The defect repairing device 1 is used, for example, for detecting a short circuit in a wiring portion, photoresist leakage, etc., in a glass substrate A on which a circuit pattern is formed by a photolithography process step in a manufacturing process of an FPD such as a liquid crystal display (LCD). When there a...

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Abstract

PURPOSE: A defect correction device is provided to prevent the deformation of optical fiber and irradiate laser beam of uniform intensity to a substrate by mounting the optical fiber in a fixed shape. CONSTITUTION: A defect correction device comprises a substrate stage, a gate-type gantry, a drive mechanism, a mounting unit, optical fiber(8), and a plurality of mode scramblers(11,12). The substrate stage keeps a substrate horizontal. The mounting unit is carried along the horizontal beam of the gantry and equipped with a laser source(7) and a machining head. The optical fiber links the laser source and the machining head. The mode scramblers adjust the mode distribution in the optical fiber by bending the optical fiber in different directions.

Description

technical field [0001] The present invention relates to a defect repairing device for repairing defects of substrates such as flat panel displays (FPDs) and semiconductor wafers with laser light. Background technique [0002] Conventionally, there has been a method of repairing defects in the substrate by irradiating the substrate with laser light emitted from a laser light source using a processing head. As an apparatus for repairing such defects, for example, a laser processing apparatus in which a laser oscillator and a processing head are connected by an optical fiber is known (see Patent Document 1). [0003] The laser processing device described in the above-mentioned Patent Document 1 has: a laser oscillator fixed at the end of the device; between. [0004] Patent Document 1: Japanese Patent Application Laid-Open No. 9-239578 [0005] However, since the laser processing apparatus described in the aforementioned Patent Document 1 moves only the laser oscillator and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/00B23P6/00
CPCB23K26/062B23K26/0648B23K26/10G02F1/1309
Inventor 中村达哉赤羽隆之
Owner OLYMPUS CORP
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