Silicone tunable optical filter and making method thereof
A filter and bulk silicon technology, applied in the field of bulk silicon tunable optical filters and fabrication, can solve problems such as high stress control requirements, deformed transmitted light signals, residual stress, etc., achieve good optical performance, simple processing technology, The effect of high structural reliability
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[0022] A bulk silicon tunable optical filter proposed by the present invention consists of a bulk silicon tuning cavity 1, a highly doped bulk silicon resistance heater 2, a lower cantilever beam 3, an upper cantilever beam 4, and a left cantilever beam 5 with a highly doped surface 1. A right cantilever beam 6 with a highly doped surface, a metal wire 7, a stress balance metal wire 8, a left lead area 9, a right lead area 10, and a supporting silicon substrate 11. Its structure is as figure 1 shown. The bulk silicon tuning cavity 1 is entirely composed of a single crystal silicon device layer of a high-resistivity SOI silicon wafer, and has good parallelism and surface optical quality. At the same time, the bulk silicon tuning cavity 1 can produce a large optical aperture. The highly doped bulk silicon resistance heater 2 is made of high-concentration semiconductor doping material, which can produce the heating resistance value required by the design, and use it to uniforml...
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