Method for generating polycrystalline silicon by recycling by-products

A by-product, polysilicon technology, applied in the direction of silicon, etc., can solve the problems of dry recycling polluting the production cycle system, polysilicon is difficult to achieve high purity, etc., to reduce equipment investment, improve quality, and improve economic benefits.

Inactive Publication Date: 2010-06-09
EXCELLENCE INTEGRITY GROUP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A large amount of reducing tail gas increases the difficulty of dry recovery, and carbon elements pollute the production cycle system during dry recovery, making it difficult for the produced polysilicon to meet the high purity requirements

Method used

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  • Method for generating polycrystalline silicon by recycling by-products
  • Method for generating polycrystalline silicon by recycling by-products
  • Method for generating polycrystalline silicon by recycling by-products

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Embodiment Construction

[0015] Such as figure 2 As shown, the method of recycling by-products to produce polysilicon is: purify SiHCl through evaporator, purification tower and condenser 3 Raw material, generating SiHCl 3 Concentrate, SiHCl 3 The fine material is subjected to H in the reduction furnace 2 Reduction reaction, the reaction temperature is 1200 ° C, polysilicon is generated, and HCl, H 2 、SiCl 4 , SiHCl 3 、SiH 2 Cl 2 Composed of by-products, the by-products are recovered by freezing to obtain SiCl 4 , SiHCl 3 、SiH 2 Cl 2 Condensate composed of HCl, H 2 Composed of gas, the condensate is circulated into the reduction furnace to continue to participate in the H 2 Reduction reaction, from HCl, H 2 The composition of the gas is passed through SiHCl 3 Synthetic furnace, react with silicon powder at 350°C to generate SiHCl 3 as SiHCl 3 Raw materials used, residual H 2 H produced by the hydrogen generator 2 are transported to the reduction furnace through the hydrogen pressure...

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Abstract

The invention provides a method for generating polycrystalline silicon by recycling by-products. The method adopts a technological process comprising: purifying SiHCl3 raw material to generate SiHCl3 concentrate, reducing the SiHCl3 concentrate by H2 in a reducing furnace to generate the polycrystalline silicon and the by-products which comprise HC1, H2, SiCl4, SiHCl3 and SiH2Cl2, freezing and recycling the by-products to obtain condensate which comprises SiCl4, SiHCl 3 and SiH2Cl2 and gas which consists of HCL and H2, processing the gas to obtain H2 and conveying H2 to the reducing furnace to perform the hydrogen reduction reaction, wherein the method for processing the gas which consists of HCL and H2 comprises the steps of reacting the gas with silicon powders to give SiHCl3 and using the generated SiHCl3 as the SiHCl3 raw material; and allowing the condensate which comprises SiCl4, SiHCl3 and SiH2Cl2 circularly to enter the reducing furnace to undergo the hydrogen reduction reaction. The method provided by the invention for generating the polycrystalline silicon can improve use efficiency of the raw materials, reduce pollution and improve purity and quality of the product.

Description

technical field [0001] The invention relates to a method for producing polysilicon, in particular to a method for producing polysilicon by recycling by-products. Background technique [0002] The relatively mature method of producing polysilicon is the improved Siemens method. The main process steps of this method are as follows: figure 1 As shown, through the evaporator, purification tower and condenser for SiHCl 3 The raw material is purified to generate SiHCl 3 Concentrate, SiHCl 3 The fine material is subjected to H in the reduction furnace 2 Reduction reaction, that is, chemical vapor deposition to generate polysilicon and HCl, H 2 、SiCl 4 , SiHCl 3 、SiH 2 Cl 2 Composed of by-products, the by-products are recovered by freezing to obtain SiCl 4 , SiHCl 3 、SiH 2 Cl 2 Condensate composed of HCl, H 2 Composed of gas, using dry recovery system to process the gas to obtain H 2 and sent to the reduction furnace to participate in the H 2 reduction reaction. [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/03
Inventor 杰克·布莱斯
Owner EXCELLENCE INTEGRITY GROUP
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