Method for increasing breakdown voltage of power MOS field effect transistor
A field effect transistor and breakdown voltage technology, which is applied in the manufacture of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of easy breakdown of MOS field effects, eliminate the angle, increase the breakdown voltage, reduce the The effect of electric field strength
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[0018] The present invention will be further described below in conjunction with the accompanying drawings.
[0019] Because in the field plate of the power MOS field effect transistor in the prior art, there is an included angle formed by a polysilicon layer, the existence of the included angle will attract more electric fields to gather, increase the electric field intensity at the included angle, and make the power MOS Field effect transistors are easily broken down. In order to solve this problem, the present invention proposes a method for improving the breakdown voltage of power MOS field effect transistors. Please refer to figure 2 , it can be seen from the figure that the first oxide layer 12 is completely located in the substrate 10, two active regions 11 are located in the substrate 10 on both sides of the first oxide layer 12, and two polysilicon gates are formed on the substrate 10 and the first oxide layer 12, the second oxide layer 15 is deposited on the polysil...
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