Methods and apparatus for idle time reduction in a production facility

Abstract

Efficient manufacturing automation system and methods are described. The automation system controls movement of materials for processing by tools in a manufacturing facility. The system and methods include pre-emptive dispatching for transferring of materials. With the pre-emptive dispatching, the next destination and next lot to be processed is determined prior to a first lot being converted to a ready to unload state. This reduces wait time or idle time to improve tool utilization.

Description

technical field [0001] The present invention relates generally to manufacturing automation systems and methods for moving material on a production line. Background technique [0002] The manufacture of a product typically includes many sequentially performed process steps. In most cases, these process steps are carried out in more than one process tool, each tool having one or more process chambers. For example, the fabrication of electronic devices on a wafer processing line involves performing process steps such as thin film deposition, photolithography, etching, heat treatment, and dopant introduction relative to a wafer substrate such as silicon. While it is possible to perform some process steps on a single process tool, it is often the case that substrates have to be transferred between different process tools at different locations on the production line. [0003] figure 1 A known processing line layout 100 is shown. The processing line layout has a number of bays...

AI Technical Summary

Problems solved by technology

While it is possible to perform some process steps on a single process tool, it is often the case that substrates have to be transferred between different process tools at different locations on the production line

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