Multilayer thin film sealing technology of organic light emitting display
A light-emitting display and multi-layer thin film technology, which is applied in the fields of electric solid-state devices, semiconductor devices, semiconductor/solid-state device manufacturing, etc., can solve the problems affecting the lifetime of OLEDs, multiple sealants, etc.
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[0016] The display with the organic light-emitting layer prepared on the single crystal silicon wafer is sealed according to the following steps:
[0017] 1. In a high-vacuum low-temperature environment with a pressure of 5×10-2Pa and a temperature of 130°C, a high-density amorphous alumina film is formed on the surface of an organic light-emitting device by atomic precipitation technology; trimethyltryptophan aluminum is used in the reaction And ozone as the reaction gas, nitrogen as the flushing gas.
[0018] 2. At a pressure of 5×10 -2 Pa, in a high vacuum and low temperature environment with a temperature of 70°C, a layer of amorphous tantalum oxide film is formed on the high-density amorphous aluminum oxide film by atomic precipitation technology; tert-butyliminotri-diethyl is used in the reaction Aminotantalum tantalum and ozone are used as reactive gases, and nitrogen is used as flushing gas.
[0019] 3. After the ALD technology is used for sealing, the display is fur...
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