Distributed MEMS phase shifter based on MAM capacitor
A phase shifter and distributed technology, applied in the field of phase shifters, can solve the problems of large volume, high insertion loss, and restricted development of phase shifters, and achieve the effect of easy integration, simple realization, and reasonable matching.
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[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0029] In the design of MEMS phase shifters suitable for millimeter wave bands, most of them design specific structures based on equivalent circuits. The MEMS phase shifter is a microwave device, and its equivalent circuit is a microwave two-port network. In this invention, see figure 2 As shown, according to the microwave transmission line theory, the coplanar waveguide can be equivalent to a transmission circuit composed of an inductor L, a capacitor C, and a resistor R (formed by the substrate, the A ground plane, the B ground plane, and the center conductor). The MEMS metal bridge and the central conductor form a parallel adjustable capacitor C3, and the phase shift output of the MEMS phase shifter is determined by the capacitance of the adjustable capacitor C3. When this mode of phase shifter is used, its adjustable capacitor C3 The capacitance value ...
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