Fully flexible MEMS optical switch
An optical switch, fully flexible technology, applied in the direction of optics, optical components, instruments, etc., can solve the problems of damaging the optical switch, affecting the rotation angle of the micro-mirror, affecting the optical transmission, etc., achieving low cost, low requirements, and accurate switching Effect
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[0016] Such as figure 1 As shown, it includes a flexible bistable mechanism 1 and a micro-mirror 3. The shuttle 5 of the flexible bistable mechanism 1 is connected to a flexible bridge 2. The micro-mirror 3 is fixed to the flexible bridge 2 through a connecting block 8. The flexible bistable mechanism The first stable position and the second stable position of 1 respectively make the micro-mirror 3 in two states of light passing and light reflecting. The flexible bridge 2 is composed of two flexible beams 6 near the bottom and a flexible beam 7 far from the bottom. The two ends of the flexible beam 7 are connected with two sections of flexible beams 6 near the bottom through the connecting block 8; The connecting block 8 of the bottom flexible beam 6 and the far bottom flexible beam 7 is connected with the micro mirror 3 . When the left end of the flexible bridge 2 has a force or displacement input along the direction of the flexible bridge parallel to the substrate, a coupl...
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