Antiradiation pressure sensor

Abstract

A radiation resistant pressure sensor consists of a silicon piezoresistive sensitive component and a metal shell, and the sensitive component consists of a silicon sensitive element with a Wheatstone bridge structure and a glass ring. A front end of the metal shell is provided with a stepped bore as a pressure opening; a periphery of a back-pressure face of the sensitive element is fixed on an internal ring surface of the stepped bore by the glass ring, and a pressure face of the sensitive element is conductively packaged flush with a front end face of the metal shell; a strain resistor on the Wheatstone bridge structure is connected with an internal lead of a gold wire, and the other end of the internal lead of the gold wire is connected to an output cable on a tail of the metal shell; the silicon sensitive element is formed by a monocrystalline silicon substrate; a silicon dioxide composite layer and a silicon nitride composite layer are sequentially formed on a front face of the monocrystalline silicon substrate and taken as insulating layers; the insulating layers extend to form four independent polysilicon layers as strain resistors; the peripheries of the insulating layers are exposed outside a ring edge of the monocrystalline silicon substrate; and the ring edge of the monocrystalline silicon substrate is fixed with the glass ring. The radiation resistance of the radiation resistant pressure sensor is improved by using the pressure sensitive component and the radiation resistant structure with radiation resistant reinforcement.

Description

technical field [0001] The invention relates to a radiation-resistant pressure sensor, in particular to a silicon piezoresistive radiation-resistant pressure sensor, which is suitable for pressure measurement in an environment with strong radiation. Background technique [0002] With the development of science, the peaceful use of nuclear technology is becoming more and more extensive: agricultural breeding, food preservation; industrial material modification, radiation technology application; medical radiation analysis, gamma knife; archaeological Detect authenticity; in environmental protection, there are more and more occasions with nuclear applications such as fire and poisonous gas alarms, isotope lightning rods, etc. In order to further improve its stability and prolong its service life, pressure sensors used in these occasions have proposed It needs to be nuclear hardened, which is the requirement to make it radiation resistant. [0003] In the environment of nuclear...

AI Technical Summary

Problems solved by technology

The unstable defect group in the silicon single crystal will degrade its performance, and the radiation of the pn junction will increase the reverse leakage current and weaken its isolation effect. In addition, the organic insulating material used in the sensor will be damaged by radiation. Cracking, resulting in brittleness, decreased insulation performance and reduced service life

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