Substrate for flexible organic optoelectronic device and preparation method thereof
A technology for optoelectronic devices and substrates, which is applied in the fields of electric solid-state devices, semiconductor/solid-state device manufacturing, photovoltaic power generation, etc., can solve problems such as poor adhesion between thin films and substrates, reduce production costs and process difficulties, achieve optimal results, and improve performance effect
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Embodiment 1
[0105] like figure 1 In the substrate structure shown, the flexible substrate 1 is a flexible polyethylene terephthalate polymer (PET) substrate, the bonding layer 2 is a single-layer UV-curable adhesive, and the conductive film 3 is ITO sputtered by DC magnetron. Transparent conductive film. The transmittance test curve is as figure 2 shown.
[0106] The preparation method is as follows:
[0107] ①Use detergent, acetone solution, ethanol solution and deionized water to ultrasonically clean the PET substrate, and dry it with dry nitrogen after cleaning;
[0108] ② Stir the UV-curable adhesive diluted 1:10 with ethanol for 20 hours, then spin-coat it on the PET surface at a speed of 2000 rpm for one minute, and the film thickness is about 100 nanometers;
[0109] ③UV curing treatment on the surface of the substrate for 30 seconds;
[0110] ④Put the substrate into a vacuum chamber, and at room temperature, by means of DC magnetron sputtering, sputter a 100-nm thick ITO tra...
Embodiment 2
[0114] like figure 1 In the substrate structure shown, the flexible substrate 1 is made of a flexible metal foil, the adhesive layer 2 is made of a single-layer UV-curable adhesive, and the conductive film 3 is a DC magnetron sputtered ITO transparent conductive film.
[0115] The preparation method is as follows:
[0116] ①Use detergent, acetone solution, ethanol solution and deionized water to ultrasonically clean the flexible metal foil, and dry it with dry nitrogen after cleaning;
[0117] ② Stir the UV-curable adhesive diluted 1:1 with ethanol for 30 hours, then spin-coat it on the surface of the flexible metal foil at a speed of 3000 rpm for 1 minute, and the film thickness is about 200 nanometers;
[0118] ③UV curing treatment on the surface of the substrate for 30 seconds;
[0119] ④ Put the substrate into the vacuum chamber, and at room temperature, by means of DC magnetron sputtering, sputter a 200-nm thick ITO transparent conductive film on the surface of the flex...
Embodiment 3
[0122] like figure 1 In the substrate structure shown, the flexible substrate 1 is a PET substrate, the bonding layer 2 is a single-layer UV-curable adhesive, and the conductive film 3 is a metal conductive film prepared by thermal evaporation.
[0123] ①Use detergent, acetone solution, ethanol solution and deionized water to ultrasonically clean the surface of the PET substrate, and dry it with dry nitrogen after cleaning;
[0124] ② Stir the UV-curable adhesive diluted 1:10 with ethanol for 20 hours, then spin-coat it on the PET surface at a speed of 2000 rpm for one minute, and the film thickness is about 100 nanometers;
[0125] ③Irradiate the surface of the substrate with ultraviolet light for 30 seconds;
[0126] ④Put the substrate into a vacuum chamber, and evaporate a 100nm thick metal conductive film on the surface of the PET substrate by thermal evaporation at room temperature;
[0127] ⑤After taking the substrate out of the vacuum chamber, irradiate with ultraviol...
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