Ultrasonic spray generator special for preparing large-area transparent conductive film

Abstract

The invention discloses a special ultrasonic spray generator for preparing large-area transparent conductive membrane, comprising a case and a plurality of ultrasonic atomizers arranged on the soleplate at the bottom of the case; outer flange is arranged at periphery of the top of the case; an upper cover is arranged on the outer flange at the top of the case; at the same time a corrosion-resistant rubber insert is arranged between the upper cover and the outer flange of the case; a carrier gas inlet is arranged on a side of the case; besides, foundation bolts are arranged at the four sides at the bottom of the case; the upper cover of the case is hermetically connected with the case through bolts and the corrosion-resistant rubber insert; the carrier gas inlet, a solution inlet and a spray outlet are respectively arranged on the upper cover of the case; the plurality of ultrasonic atomizers are corrosion-resistant ultrasonic atomizers. The ultrasonic spray generator provided by the invention arranges a plurality of corrosion-resistant atomizers in the case to be directly contacted with chemical solution, has the advantages of even solution pulverization and high spray efficiency, and can meet the requirements for preparing the large-area transparent conductive membrane effectively and stably.

Description

technical field [0001] The invention relates to the field of coating of optoelectronic thin film materials, in particular to a special ultrasonic spray generator for preparing large-area transparent conductive films. Background technique [0002] Amorphous silicon thin-film solar cells have good semiconductor optoelectronic properties, and low cost and large-scale production make them have outstanding advantages in competition with other semiconductor devices. In addition, the manufacturing process of thin-film cells is simple and convenient for large-area continuous The transparent conductive film is the most basic material required for thin-film solar cells. [0003] The transparent conductive film for solar cells is a transparent semiconductor material with excellent optical and electrical properties, and has broad application prospects in the fields of other electronic devices, display devices and building materials. The main deposition techniques used to prepare transp...

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Problems solved by technology

However, due to the low power of the ultrasonic spray generator used in this invention patent, and the ultrasonic wave must penetrate the special fogging bottle, its fogging efficiency is low, and it is not suitable for the preparation of large-area transparent conductive films. At present, it can only be used for experiments. Indoor small area test used

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