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Microstructure body and manufacturing method thereof

A technology for microstructures and manufacturing methods, which can be used in nanostructure manufacturing, anodization, nanotechnology, etc., and can solve problems such as inability to ensure continuity

Inactive Publication Date: 2008-11-12
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this method, at the same time as the barrier layer is etched, the partition walls between the adjacent micropores are also etched, so sufficient penetration cannot be ensured unless the partition walls between the holes are extremely thin.

Method used

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  • Microstructure body and manufacturing method thereof
  • Microstructure body and manufacturing method thereof
  • Microstructure body and manufacturing method thereof

Examples

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Embodiment Construction

[0050] "The first embodiment of the method of manufacturing a microstructure"

[0051] A first embodiment of the method for producing a microstructure according to the present invention will be described with reference to the drawings. figure 1 and figure 2 It is a process diagram showing the manufacturing method, figure 1 is a stereogram, figure 2 With figure 1 Corresponding sectional view.

[0052] First, as the anodized metal body 10, an anodized metal body 10 ( figure 1 (a), figure 2 (a)). The shape of the anodized metal body 10 is not limited, and examples thereof include a plate shape and the like. In addition, it may be used in the form of having a support such as one in which the anodized metal body 10 is formed into a layered film on a support.

[0053] Next, the anodized metal body 10 is anodized until halfway, an aluminum oxide (Al 2 o 3 ) layer composed of anodized film (anodized part, anodized body) 11. Such as figure 1 (b), figure 2 As shown in (...

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PUM

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Abstract

A superfine construct and the method of producing the same; the method is able to simply produce the superfine construct having anodic oxide; the anodic oxide has a plurality of micro holes; the micro hole has excellent connectivity to connect to the electrical conductor. The method comprises: preparing anodized metal (10), anodizing the anodized metal (10), until the midway to form a plurality of anodized parts (11) having bottom micro holes (12) on the opening of the anodizing surface (10S) of the anodized metal (10) and non-anodized parts (13); dry etching the anodized part (14b) between bottom having a plurality of micro holes (12) and the non-anodized parts (13) to the non-anodized parts (13), thereby removing the same.

Description

[0001] technology area [0002] The present invention relates to a microstructure having a plurality of micropores on the surface and a method for producing the same, and particularly relates to a microstructure obtained by anodizing metal. Background technique [0003] A device has been proposed in which a substance is filled into a plurality of micropores of an anodized film obtained by anodizing a metal to make it functional. Anodized film (Al, etc.) obtained by anodizing metal (Al, etc.) 2 o 3 etc.) is a metal oxide having a plurality of fine pores that are naturally formed on the surface of the anodized film in the process of anodic oxidation and have a pore diameter on the order of nanometers and are approximately regularly arranged. Therefore, for example, by filling a plurality of micropores of the anodic oxide film with metal, microscopic metal bodies having a size on the order of nanometers can become microstructures substantially regularly arranged and fixed throu...

Claims

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Application Information

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IPC IPC(8): C25D11/02C25D11/04B82B3/00B82B1/00
Inventor 都丸雄一李静波
Owner FUJIFILM CORP
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