Method for preparing ITO nanometer line and gas sensor thereof
A gas sensor and nanowire technology, applied in the direction of material resistance, etc., to achieve high sensitivity, good gas sensitivity characteristics, and reduce the cost of raw materials
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Embodiment 1
[0042] Embodiment 1: ITO nanowire preparation method:
[0043] (1) 5 nanometers thick gold film is deposited on the base substrate;
[0044] (2) After the powders of indium oxide, stannous oxide and graphite are fully mixed with a mass ratio of 1: 3.8: 0.8, the mixed powder is put into an alumina boat, and the substrate substrate is placed on the alumina boat;
[0045] (3) Put the alumina boat into the quartz tube, then put the quartz tube into the tube furnace, and then heat the tube furnace to 600°C for 1 minute;
[0046] (4) After the tube furnace is cooled to room temperature, the slightly yellow product-ITO nanowires are generated on the substrate;
[0047] During the above preparation process, the gas pressure in the quartz tube was 250 Pa, and a mixed gas of argon and oxygen was fed at a rate of 10 sccm at the same time, and the volume ratio of oxygen in the mixed gas was 5%.
[0048] The base substrate is an N-type silicon substrate, and the gold film is deposited by...
Embodiment 2
[0049] Embodiment 2: ITO nanowire preparation method:
[0050] (1) spraying a 1 micron thick gold film on the base substrate;
[0051] (2) After the powders of indium oxide, stannous oxide and graphite are fully mixed with a mass ratio of 1: 4.2: 1.2, the mixed powder is placed in an alumina boat, and the substrate substrate is placed on the alumina boat;
[0052] (3) Put the alumina boat into the quartz tube, then put the quartz tube into the tube furnace, then heat the tube furnace to 1200°C for 10 hours;
[0053] (4) After the tube furnace is cooled to room temperature, the slightly yellow product-ITO nanowires are generated on the substrate;
[0054] During the above preparation process, the air pressure in the quartz tube is 250-350 Pa, and at the same time, a mixed gas of nitrogen and oxygen is fed at a speed of 30 sccm, and the volume ratio of oxygen in the mixed gas is 20%. The base substrate is a P-type silicon substrate, and the gold film is deposited by sputtering...
Embodiment 3
[0055] Embodiment 3: the preparation of ITO nanowire gas sensor:
[0056] (1) ITO nanowires are uniformly dispersed in an ethanol solution to make a slurry;
[0057] (2) coating the slurry on a ceramic tube with two gold electrodes and covering the electrodes;
[0058] (3) drying or sintering, that is, heating to 50°C for 10 hours;
[0059] (4) Lead connection. The resulting product is aged for 24 hours.
[0060] The substrates of the two electrodes are realized by photolithography on the ceramic sheet.
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