Method of manufacturing magnetic micro-structure
A fabrication method and microstructure technology, applied in the directions of microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problems of magnetic microstructure height limitation, complicated process, only below 50μm, etc., to reduce the requirements and Relying on, avoiding height restrictions, and making the process simple and fast
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Embodiment 1
[0059] The following describes in conjunction with Figure 3, taking the fabrication of a magnetic microcolumn array with a height of 100 μm in a PDMS chip as an example, and details the specific process flow of this method for fabricating a microfluidic chip. The chip can be used for sample enrichment, DNA purification, protein capture, online enzyme reaction, etc. The specific process is shown in Figure 3, including the following nine steps:
[0060] (a) The standard RCA cleaning process is used, that is, the Piranha washing solution (H 2 SO 4 :H 2 o 2 ), RCA1 (NH 3 ·H 2 O:H 2 o 2 :H 2 O), RCA2 (concentrated hydrochloric acid: H 2 o 2 :H 2 O) Strictly clean the surface of the silicon wafer 3, and then dry it strictly in an oven or a hot plate after blowing it dry with nitrogen gas [Fig. 3 (a)];
[0061] (b) Spin-coat a layer of SU-8 2050 photoresist (provided by MicroChem) 4 on the front of the silicon wafer, and pre-baked and cured [Figure 3(b)];
[0062] (c) Ali...
Embodiment 2
[0072] The basic processing technology of the cell screening chip with a magnetic micro-strip structure ( FIG. 6 ) is the same as that of the magnetic micro-column array chip in Example 1.
[0073] This embodiment applies:
[0074] Mark the magnetic beads on the target cells, pass the sample solution into the microchannel, place a magnet on one side of the chip, wait until the cells marked with magnetic beads are basically adsorbed around the microline, then remove the magnetic field, continue to pass in the solution, and mark with magnetic beads The cells of the beads and the cells of the unlabeled magnetic beads will flow out from the blocked outlet respectively, and the cell screening is completed.
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