Vibration static micro generator based on liquid medium and its array
A micro-generator and liquid medium technology, applied in the field of micro-energy, can solve the problems of low-frequency vibration response, easy damage of suspension beams, and low conversion efficiency, and achieve high integration, improved response ability, and improved stability.
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[0034] Below in conjunction with accompanying drawing, the technical scheme of the present invention is further described:
[0035] In conjunction with Fig. 6, Fig. 7 and Fig. 8, it can be seen that the vibrating electrostatic micro-generator based on the liquid medium mainly includes an electret 1, a first variable capacitor composed of a lower pole plate 2, a micro-liquid medium 3 and a common upper pole plate 9 10, the second variable capacitor and the processing circuit 13 formed by the lower plate 4, the micro-liquid medium 3 and the common upper plate 9, both variable capacitors are based on the substrate.
[0036] The substrate is divided into upper, middle and lower parts. In the middle of the middle substrate 7 is a cavity connected up and down formed by an etching process. The upper and lower parts cover the upper substrate 12 and the lower substrate through silicon-silicon bonding and silicon-glass bonding processes respectively. The bottom 5 forms a capacitor cavit...
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