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Vibration static micro generator based on liquid medium and its array

A micro-generator and liquid medium technology, applied in the field of micro-energy, can solve the problems of low-frequency vibration response, easy damage of suspension beams, and low conversion efficiency, and achieve high integration, improved response ability, and improved stability.

Inactive Publication Date: 2009-08-19
CHONGQING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Limited by the existing MEMS technology, the natural frequency of this variable capacitor is difficult to be below 100Hz, and the response to low-frequency vibration is low, resulting in low conversion efficiency of micro-generators to low-frequency vibration mechanical energy, which cannot meet the requirements of micro-generators in low-frequency vibration environments. Requirements for power-consuming devices
At the same time, in the case of impact, drop, etc., the suspension beam is easily damaged, resulting in failure of the generator, so its reliability is not high

Method used

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  • Vibration static micro generator based on liquid medium and its array
  • Vibration static micro generator based on liquid medium and its array
  • Vibration static micro generator based on liquid medium and its array

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Embodiment Construction

[0033] Below in conjunction with accompanying drawing the technical scheme of the present invention is further described:

[0034] combine Figure 6 , Figure 7 and Figure 8 It can be seen that the vibrating electrostatic miniature generator based on the liquid medium mainly includes an electret 1, the first variable capacitor 10 formed by the lower plate 2, the micro-liquid medium 3 and the common upper plate 9, the lower plate 4, the micro-liquid The medium 3 and the common upper plate 9 constitute the second variable capacitor and the processing circuit 13, and both variable capacitors use the substrate as the base.

[0035] The substrate is divided into upper, middle and lower parts. In the middle of the middle substrate 7 is a cavity connected up and down formed by an etching process. The upper and lower parts cover the upper substrate 12 and the lower substrate through silicon-silicon bonding and silicon-glass bonding processes respectively. The bottom 5 forms a capa...

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Abstract

The invention provides a vibrate type static electricity mini-type generator with liquid medium which is composed of two variable capacitors and a processing circuit; wherein the variable capacitor is composed of an upper counter electrode, a lower counter electrode, an electret, substrates and micro-liquid medium, wherein a middle substrate, an upper substrate and a lower substrate form the chamber of the capacitor, the electret is assembled on the lower inside wall of the chamber of the capacitor, the upper counter electrodes of the two capacitors are assembled in parallel on the upper inside wall of the chamber of each capacitor, the micro-liquid medium is arranged inside the chambers the capacitors. A film of oleophobic or lyophobic medium is provided on the inside wall of the chamber of capacitor with the splashing property of the liquid medium, the upper counter electrodes of the two capacitors are connected with each other to serve as a common upper counter electrode as well as the back electrode of the electret. The two lower counter electrodes and the common upper counter electrode are respectively provided with extraction electrodes which are connected with the processing circuit. The generator adopts the liquid as the medium of the variable capacitor, in which the liquid medium flows to change the capacity during vibration to shift the electric charge between the counter electrodes of the capacitor to realize the conversion from mechanical energy to electrical energy.

Description

technical field [0001] The invention belongs to the field of micro energy technology, in particular to a micro generator. Background technique [0002] Micro-energy is a portable device, especially a wireless sensor network, a bio-implanted device (such as various implanted measurement systems, implanted medical devices, etc.) or an embedded monitoring device (such as a building-embedded monitoring sensor) One of the most important key elements in the system. Due to the limited capacity of currently used chemical energy or fuel cells, etc., it has become a decisive factor affecting the life of the system. Although researchers have made important progress in improving the energy density of batteries and reducing the energy consumption of micro-devices, which is of great significance to prolonging the service life of the system, they cannot fundamentally solve the problem that the limited energy capacity affects the service life of the system. limit problem. An ideal soluti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K11/00H02K7/06H02K15/00
Inventor 温中泉温志渝
Owner CHONGQING UNIV
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