Vibration static micro generator based on liquid medium and its array
A micro-generator and liquid medium technology, applied in the field of micro-energy, can solve the problems of low-frequency vibration response, easy damage of suspension beams, and low conversion efficiency, and achieve high integration, improved response ability, and improved stability.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0033] Below in conjunction with accompanying drawing the technical scheme of the present invention is further described:
[0034] combine Figure 6 , Figure 7 and Figure 8 It can be seen that the vibrating electrostatic miniature generator based on the liquid medium mainly includes an electret 1, the first variable capacitor 10 formed by the lower plate 2, the micro-liquid medium 3 and the common upper plate 9, the lower plate 4, the micro-liquid The medium 3 and the common upper plate 9 constitute the second variable capacitor and the processing circuit 13, and both variable capacitors use the substrate as the base.
[0035] The substrate is divided into upper, middle and lower parts. In the middle of the middle substrate 7 is a cavity connected up and down formed by an etching process. The upper and lower parts cover the upper substrate 12 and the lower substrate through silicon-silicon bonding and silicon-glass bonding processes respectively. The bottom 5 forms a capa...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com