Metastable state assistant quantum dot resonance tunneling diode and working condition
A technology of resonant tunneling and quantum dots, applied in diodes and other directions, can solve problems such as limiting the wide application of single-electron devices, and achieve the effects of expanding applications, simple diode structure, and increasing operating temperature.
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[0039] Below by embodiment, the specific embodiment of the present invention is described in further detail:
[0040]The embodiment provides a prototype structure of an InAs / GaAs surface quantum dot double barrier diode working at room temperature and a preparation method thereof. In this method, an n-type GaAs collector layer 5 is first formed on a GaAs substrate 6 and then an intrinsic GaAs second tunneling layer 4 is formed on the collector layer. Thereafter, an InAs quantum dot layer 3 is formed on the GaAs second tunneling layer. Then, an oxidized first tunneling layer 2 is formed on the surface of the InAs quantum dots. Finally, a conductive scanning probe is used as the metal emitter 1 .
[0041] The thickness of the n-type GaAs collector layer is 1000 nm, and the doping concentration of n-type Si is 1×10 18 cm -3 ;
[0042] The thickness of the intrinsic GaAs second tunneling layer is less than 4 atomic layers;
[0043] The base diameter of the InAs quantum dot s...
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