Coating film having thinly-spreading and irregularity-conforming properties, and structural base having such film
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synthetic example 1
[0220]While keeping the temperature at 60° C., 28.00 g of acid phosphoxyethyl methacrylate (product name: Phosmer M manufactured by Uni-Chemical Co., nonvolatile content measured by drying process at 100° C. for 1 hour: 91.8%, mixture of acid phosphoxyethyl methacrylate (44.2 mass %), bis[2-(methacryloyloxy)ethyl]phosphate (28.6 mass %) and others (27.2 mass %)) was stirred, and 21.37 g of 2-(dimethylamino)ethyl methacrylate was added thereto dropwise. While keeping the temperature at not more than 20° C., 133.96 g of pure water, then 44.65 g of ethanol (manufactured by Tokyo Chemical Industry Co., Ltd.) and 0.25 g of 2,2′-azobis(N-(2-carboxyethyl)-2-methylpropionamidine) n-hydrate (product name: VA-057 manufactured by Wako Pure Chemical Industries, Ltd.) were added to the mixture sequentially. The resultant mixture was sufficiently stirred to uniformity. The mixture liquid thus obtained which contained the above materials was introduced into a dropping funnel. Separately, 267.93 g ...
synthetic example 2
[0221]29.95 g of choline (48-50% aqueous solution manufactured by Tokyo Chemical Industry Co., Ltd.) was added to 25.00 g of acid phosphoxyethyl methacrylate (product name: Phosmer M manufactured by Uni-Chemical Co., nonvolatile content measured by drying process at 100° C. for 1 hour: 91.8%, mixture of acid phosphoxyethyl methacrylate (44.2 mass %), bis[2-(methacryloyloxy)ethyl] phosphate (28.6 mass %) and others (27.2 mass %)) while performing cooling so that the temperature was 35° C. or below. The resultant mixture was stirred to uniformity. While keeping the temperature at not more than 35° C., 20.95 g of an 80% aqueous methacryloylcholine chloride solution (manufactured by Tokyo Chemical Industry Co., Ltd.), 28.67 g of butyl methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.), 0.70 g of 2,2′-azobis(2,4-dimethylvaleronitrile) (product name: V-65 manufactured by Wako Pure Chemical Industries, Ltd.) and 110.84 g of ethanol were added to the mixture liquid sequentiall...
example 1
[0222]28.73 g of pure water, 13.95 g of ethanol, and 0.85 g of a 1 mol / L aqueous sodium hydroxide solution (1 N) (manufactured by KANTO CHEMICAL CO., INC.) were added to 5.00 g of the copolymer-containing varnish obtained in Synthetic Example 1. The mixture was sufficiently stirred to give a coating agent. The pH was 7.5. A commercial silicon wafer for semiconductor evaluation, and a culture plate (Corning (registered trademark) #351172 (96 wells, volume 0.37 mL) (material: polystyrene) were dipped into the coating agent and were dried in an oven at 50° C. for 24 hours. Thereafter, the wafer and the plate were sufficiently washed with pure water. Thus, coating films were formed on the silicon wafer and the plate. The film thickness of the coating film on the silicon wafer was measured with an ellipsometer to be 147 Å.
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