Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers

Abstract

A method is provided which includes forming a metal layer and converting at least a portion of the metal layer to a hydrated metal oxide layer. Another method is provided which includes selectively depositing a dielectric layer upon another dielectric layer and selectively depositing a metal layer adjacent to the dielectric layer. Consequently, a microelectronic topography is formed which includes a metal feature and an adjacent dielectric portion comprising lower and upper layers of hydrophilic and hydrophobic material, respectively. A topography including a metal feature having a single layer with at least four elements lining a lower surface and sidewalls of the metal feature is also provided herein. The fluid / s used to form such a single layer may be analyzed by test equipment configured to measure the concentration of all four elements. In some cases, the composition of the fluid / s may be adjusted based upon the analysis.

Description

CONTINUING DATA[0001]The present application is a divisional from U.S. patent application Ser. No. 10 / 462,343 filed Jun. 16, 2003.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]This invention generally relates to microelectronic processing, and more particularly to the formation and processing of diffusion barrier layers.[0004]2. Description of the Related Art[0005]The following descriptions and examples are not admitted to be prior art by virtue of their inclusion within this section.[0006]Electroless plating is a process for depositing materials on a catalytic surface from an electrolyte solution without an external source of current. An advantage of an electroless deposition process is that it can be selective, i.e., the material can be deposited only onto areas that demonstrate appropriate chemical properties. In particular, local deposition can be performed onto metals that exhibit an affinity to the material being deposited or onto areas pretreated or pre-acti...

AI Technical Summary

Benefits of technology

The patent text describes a system and method for processing microelectronic topographies in a chamber. The system includes a process chamber with various components such as a substrate holder, supply lines, process control devices, and temperature and pressure gauges. The system can be adapted to perform different processes within the chamber and can be used with different fluids for preparing and processing the microelectronic topography. The method involves loading the microelectronic topography into the process chamber, forming different enclosed regions around it, and supplying fluids to the enclosed regions to conduct the process steps. The microelectronic topography can also be spun during the process. The technical effects of the patent text include improved processing of microelectronic topographies with the system and method, as well as increased efficiency and flexibility in the process.

Problems solved by technology

Another common problem with treating a surface in a series of baths is the exposure of the substrate surface to air during the transfer between baths.

Such an exposure to air may cause oxidation of the substrate surface that will result in poor catalytic activity and poor quality metal deposits.

This problem becomes especially troublesome when using materials that easily oxidize in air, such as copper.

Such apparatuses, however, fail to prevent the solutions from the plurality of different process steps from mixing once they are expelled from the process chamber.

Consequently, the apparatuses may not reuse process solutions within the apparatus, incurring higher material costs and waste disposal costs for the electroless deposition process.

In addition, such apparatuses fail to provide a manner with which to supply air exterior to the process chamber during processing, such as for a drying step, for example.

In particular, prior art apparatuses may only offer two modes of operation, one in which the chamber is sealed for processing and another in which the chamber is not sealed for loading.

In other cases, prior art apparatuses may not be sealed at all.

In any embodiment, another problem with conventional process chambers is the manner in which a substrate is secured within the process chamber.

In particular, few conventional process chambers offer a manner with which to secure a substrate without causing damage to the substrate, particularly along the edges of the substrate.

One common drawback of existing electroless deposition processes and apparatuses is low speed of deposition.

However, many electroless deposition solutions tend to decompose at high temperatures, leading to significant non-uniformities in the deposited material.

On the other hand, deposition rates of electroless solutions at relatively low temperatures may be undesirably low, reducing production throughput and increasing fabrication costs.

Another common problem with electroless deposition processes is the formation of gas bubbles on the substrate surface during processing.

The gas bubbles undesirably prevent a material from being deposited uniformly upon a substrate surface, potentially depositing a layer outside the specifications of the process.

In some cases, however, it may be difficult to clean and activate the barrier layer for a sufficient deposition of a bulk metal layer.

In particular, the barrier layer may be cleaned and activated for the deposition of the bulk metal layer, but it may be difficult to prevent the surface from being contaminated between processes.

In addition or alternatively, it may be difficult to selectively deposit or align a cap layer upon the bulk metal layer such that no other metal adheres to the dielectric portions of the topography arranged adjacent to the metal feature.

In either case, portions of the cap layer may be undesirably deposited upon the dielectric portion, potentially causing a short within the circuit.

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