Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions

Abstract

Methods for forming doped silane and / or semiconductor thin films, doped liquid phase silane compositions useful in such methods, and doped semiconductor thin films and structures. The composition is generally liquid at ambient temperatures and includes a Group IVA atom source and a dopant source. By irradiating a doped liquid silane during at least part of its deposition, a thin, substantially uniform doped oligomerized / polymerized silane film may be formed on a substrate. Such irradiation is believed to convert the doped silane film into a relatively high-molecular weight species with relatively high viscosity and relatively low volatility, typically by cross-linking, isomerization, oligomerization and / or polymerization. A film formed by the irradiation of doped liquid silanes can later be converted (generally by heating and annealing / recrystallization) into a doped, hydrogenated, amorphous silicon film or a doped, at least partially polycrystalline silicon film suitable for electronic devices. Thus, the present invention enables use of high throughput, low cost equipment and techniques for making doped semiconductor films of commercial quality and quantity from doped “liquid silicon.”

Description

RELATED APPLICATIONS [0001] This application is a continuation of U.S. application Ser. No. 10 / 949,013 (Attorney Docket No. IDR0302), filed Sep. 24, 2004, pending, which is incorporated herein by reference in its entirety.FIELD OF THE INVENTION [0002] The present invention generally relates to the fields of doped silane and semiconductor thin films and thin film structures, methods of forming doped silane and semiconductor thin films, and doped liquid phase silane compositions useful in such methods. DISCUSSION OF THE BACKGROUND [0003] There are a number of silanes that are liquid at ambient temperatures (e.g., from about 15° C. to about 30° C.) or that can be formulated into an ink composition that is liquid at ambient temperatures. Liquid silanes, such as cyclopentasilane or cyclohexasilane, have been investigated as candidate “liquid silicon” precursors. However, to date, it has been challenging to make semiconducting thin films of commercial qualities and quantities from “liquid...

AI Technical Summary

Benefits of technology

[0007] Embodiments of the present invention relate to doped silane and / or semiconductor thin film structures, methods of forming doped silane and / or semiconductor thin films, and doped liquid phase silane compositions useful in such methods. In one aspect, the present invention concerns a method of coating a substrate, comprising the steps of (a) coating the substrate with a liquid phase composition comprising a doped silane; and (b) irradiating the liquid phase composition sufficiently to (i) cross-link, isomerize, oligomerize and / or polymerize the doped silane, (ii) form a substantially uniform layer on the substrate, the layer comprising a doped oligo- and / or polysilane, and / or (iii) increase an average molecular weight, increase a viscosity and / or reduce a volatility of the composition. At least part of the irradiating step is performed during at least part of the coating step. Optionally, the method may form a thin film pattern, and may comprise printing a liquid phase composition comprising a doped silane in a pattern on a substrate and irradiating the composition and / or pattern.

Problems solved by technology

However, to date, it has been challenging to make semiconducting thin films of commercial qualities and quantities from “liquid silicon” precursors.

One such challenge has related to doping such “liquid silicon” precursors and / or the films formed therefrom.

The properties of thin films formed from such compounds are somewhat disappointing, given the relative proportion of dopant atoms in the film-forming mixture.

Also, the results are not quite as reproducible as would be generally desired for commercial applications.

The mechanisms behind the disappointing results are not well understood.

However, to date, methods of making a thin doped semiconducting film or film structure from liquid silanes have not been sufficiently reliable for high-volume commercial use.

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