Source for thermal physical vapor deposition of organic electroluminescent layers

Abstract

The present invention disclosed the deposition source installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organic electroluminescent layers onto the substrate, and comprising a vessel consisted of a top plate on which a vapor efflux aperture is formed, a side wall, and a bottom wall; a heating means for supplying heat to the deposition material received in the vessel, the heating means being capable of moving vertically; and a means for moving the heating means (or the bottom wall), the moving means (or the bottom wall) being operated in response to the signal of a sensing means on varied distances between the heating means and the surface of said deposition material. Thus, the heating means is moved downward (or the bottom wall) is moved upward by the moving means to maintain the distance between the heating means (or the substrate to be coated) and the surface of the deposition material at an initially-set value when the thickness of the deposition material is decreased.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a deposition source for thermal physical vapor deposition of organic electroluminescent layers, and particularly to a deposition source capable of forming a uniform electroluminescent layer on the entire surface of a substrate by compensating increase of the distance between a deposition material and a heating means (or the substrate) from change of the thickness of the deposition material. BACKGROUND OF THE INVENTION [0002] Thermal physical vapor deposition process, which is one of the processes for depositing an organic electroluminescent device, is a technique to coat an electroluminescent layer on a substrate in a housing with vaporized deposition material. In the deposition process, the deposition material is heated to the point of vaporization and the vapor of the deposition material is condensed on the substrate to be coated after the deposition material is moved out of the deposition source. This process is carri...

AI Technical Summary

Benefits of technology

[0021] An object of the present invention is to provide the deposition source which can compensate change of the distance between the heating means and the surface of the deposition material caused by decrease of the thickness of the deposition material according to consumption of the deposition material in the deposition process for the purpose of solving problems caused by increase of the distance between the top plate (heating means) of the deposition source and the surface of the deposition material supplied into the deposition source from the deposition process.

[0022] Another object of the present invention is to provide the deposition source which can enhance thermal efficiency through preventing heat generated at the heating means from exiting to the exterior by adding a heat-cutting function.

[0023] Further, another object of the present invention is to provide the deposition source for forming organic electroluminescent layers which can obtain a uniform deposition layer by minimizing factors of temperature change and by efficiently using all the deposition material through supplying heat to the deposition source adjoining the surface of the bottom wall.

Problems solved by technology

Organic powder has been recognized as giving a number of disadvantages for this type of thermal vaporization coating.

First, many organics are relatively complex compounds (high molecular weight) with relatively weak bonding, and so intensive care must be taken to avoid decomposition during the vaporization process.

Second, the powder form can give rise to particles of non-vaporized electroluminescent materials.

The particles leave the deposition source with vapor and are deposited as undesirable lumps on the substrate.

These unwanted particulates or droplets may result in unacceptable defects in products, particularly in electronic or optical products, dark spots may appear in images, or shorts or opens may result in failures within electronic devices.

Low molecule organic electroluminescent material contains a large amount of organic material unstable to heat, and causes a problem of lowering the characteristics of the organic electroluminescent material by inducing resolution or change of the material characteristics due to excessive radiant heat in the deposition process.

Such additional processes cause loss of the process time.

Another drawback of the deposition source 10 is that the heat generated at the top plate 11A and the side wall 11D is not sufficiently transferred to the deposition material 20 located at the lower portion of the deposition source 10, that is, the deposition material 20 adjoining the surface of the bottom wall 11E.

Therefore, it is difficult to form a uniform deposition layer on the substrate.

Images