Semiconductor device
a technology of semiconductor devices and semiconductors, applied in semiconductor devices, semiconductor/solid-state device details, electrical apparatus, etc., can solve the problems of obstructing the reduction of packaging cost and high cost of mounting substrates, and achieve the effect of improving heat dissipation performance and reducing packaging cos
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[0072] FIGS. 1 to 12 are related to the structure of a semiconductor device according to a first embodiment of the present invention. FIGS. 13 to 23 are related to a method of manufacturing the semiconductor device of the first embodiment. FIGS. 24 to 30 are related to a semiconductor device package structure as part of an electronic device in which the semiconductor device of the first embodiment is incorporated.
[0073] In this first embodiment, reference will be made to an example in which the present invention is applied to a power MOSFET device (semiconductor device). In the power MOSFET device is incorporated a semiconductor chip formed with a vertical power MOSFET. A source (S) electrode as a first electrode and a gate (G) electrode as a control electrode are provided on a first main surface of the semiconductor chip, while a drain (D) electrode as a second electrode is provided on a second main surface opposite to the first main surface. The second electrode serves as a back ...
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