Pressure sensor, method of producing the sensor, and in-cylinder pressure detection structure of internal combustion engine
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[0065] Several embodiments of the present invention shown in the drawings will now be described. A pressure sensor A includes a piezoelectric element B in the form of a thin film, which is mounted on a base material C formed of an insulating material such as insulating ceramics. In the embodiment, the piezoelectric element B uses a thin film of aluminium nitride (AlN) having a C-axis orientation.
[0066] Signal transmitting means which delivers an electrical signal detected by the thin film of the piezoelectric element B comprises a first and a second output electrode D and E, which are disposed on the surface of the piezoelectric element B which is disposed toward the base material C. Output lead wires F and G which also define the signal transmitting means and which are connected to the electrodes D and E, respectively, pass through the inside of the base material C. Thus, in distinction to the prior art arrangement (Japanese Laid-Open Patent Application No. 10-122,984), the pair o...
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