Carrier for holding an object to be polished
a technology for polishing objects and carriers, which is applied in the direction of manufacturing tools, contraceptive devices, diagnostic recording/measuring, etc., can solve the problems of carrier falling off from the polishing apparatus, reducing durability over time, and destabilizing the polishing conditions, so as to achieve superior durability and abrasion resistance, and the effect of holding the polishing object with eas
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example 1
[0024] (Production of DLC Coated Carrier)
[0025] An SUS-made carrier substrate, which had been lapped into the thickness of 550 μm in advance, was coated with DLC into the thickness of 2.5 μm. After the substrate was coated with the DLC up to 1.0 μm under the film formation temperature set to 150° C., the supporting position was shifted to resume the deposition by 1.5 μm.
[0026] (Wear Test and Durability Test)
[0027] The resultant DLC coated carrier was polished under the conditions of Table 1 without holding the polishing object. The diluted abrasive was recycled. A wear rate was determined by calculating a difference between the thicknesses measured before and after the polishing with a micrometer. The durability was examined based on a visual test.
example 2
[0032] The DLC coated carrier produced in Example 1 was polished under the conditions of Table 3 with the carrier holding a 6-inch silicon wafer as a polishing object. In Example 2, the diluted abrasive was not recycled.
COMPARITIVE EXAMPLES 4 TO 6
[0033] The three types of carriers used in Comparative Examples 1 to 3, that is, the SUS-made carrier, the glass-epoxy-resin-made (EG-made) carrier, and the FR-vinylon-made carrier were employed. Similar to Example 2, the carriers were polished under the conditions of Table 3, with the carriers holding the 6-inch silicon wafer. In Comparative Examples 1 to 3, the diluted abrasive was not recycled. Polishing test results of Example 2 and Comparative Examples 4 to 6 are listed in Table 4 below.
TABLE 4ComparativeComparativeComparativeExample 1Example 1Example 2Example 3itemDLC*1SUSEG*2FR-vinylonFe5 or lower455 or lower5 or lowerCu5 or lower85 or lower5 or lowerCr5 or lower135 or lower5 or lower
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