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Method and apparatus for a reticle with purged pellicle-to-reticle gap

a technology of pellicle and reticle, applied in the field of photolithography systems, can solve the problem that the oxygen in the ambient atmosphere of the clean room cannot be purged, and achieve the effect of reducing or eliminating pellicle or pellicle distortion

Inactive Publication Date: 2005-07-14
ASML HLDG NV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention is about a method and apparatus for a reticle with a purged pellicle-to-reticle gap. The invention maintains a purge gas environment in the gap, which is important for high-quality light transmission. The purge gas helps to prevent particles from depositing on the reticle surface and degrading the image projected onto a semiconductor wafer surface. The invention also includes a porous frame that acts to normalize the pressure within the gap with external ambient air, reducing distortion of the reticle and pellicle. The porous frame can be coupled to a purge gas supply and a vacuum source to continuously infuse and remove gas from the gap. The invention can be used in a photolithography system and in other optical environments.

Problems solved by technology

In some situations, the ambient atmosphere of the clean room cannot be purged of oxygen because this may cause other problems with the photolithography process.

Method used

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Embodiment Construction

[0032] To more clearly delineate the present invention, an effort is made throughout the specification to adhere to the following term definitions as consistently as possible.

[0033]“Ambient air” means an oxygen-containing atmosphere, such as normal atmospheric air. For instance, “ambient air” may mean air in an oxygen-containing clean room atmosphere or environment.

[0034]“Purge gas” means a gas that does not contain oxygen, or some other undesired gas, and is used to fill a purged air gap or space.

[0035]FIG. 1 illustrates a relevant portion of a conventional photolithography system 100. Conventional photolithography system 100 is located in an ambient air or gas environment. Some portions of a conventional photolithography system may not be shown in FIG. 1 for purposes of brevity, such as source optics, projection optics, etc.

[0036] Conventional photolithography system 100 comprises an illumination source 102, a reticle 104, a frame 106, a pellicle 108, and a semiconductor wafer...

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Abstract

A method and apparatus for maintaining a purged optical gap between a pellicle and a reticle in a photolithography system. A frame between a reticle and a pellicle maintains the purged optical gap. The frame defines first and second opposing surfaces. The first opposing surface defines a first opening, and is configured to mate with the pellicle. The second opposing surface defines a second opening, and is configured to mate with the reticle to enclose the optical gap between the pellicle and the reticle. At least one edge of the frame has an opening therethrough. A porous sintered material fills each opening through an edge of the frame.

Description

CROSS-REFERENCE TO OTHER APPLICATIONS [0001] This is a continuation-in-part application of pending U.S. application Ser. No. 09 / 501,180, filed Feb. 10, 2000, Attorney Docket No. 1857.0060000, now allowed, which is herein incorporated by reference in its entirety.BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention is generally related to photolithography systems, and more particularly, to maintaining an oxygen-purged optical path through a reticle and pellicle. [0004] 2. Background Art [0005] In the fabrication of integrated circuits, photolithographic and projection printing techniques are used. In photolithography, an image contained on a reticle is projected onto a wafer having a photosensitive resist thereon. The reticle or mask is used to transfer a desired image onto the silicon wafer. The semiconductor wafer surface is coated with photosensitive resist so that an image is etched thereon. A pellicle may be used in combination with the retic...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G03F1/14G03F7/20
CPCG03F1/142G03F7/70983G03F7/70933G03F1/64
Inventor LAGANZA, JOSEPHIVALDI, JORGELUO, FLORENCE
Owner ASML HLDG NV
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