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Bubbling reaction cleaning device and method

A technology for cleaning devices and air bubbles, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., which can solve problems such as large water consumption, environmental protection, and inability to handle metal layer materials

Inactive Publication Date: 2007-06-27
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] In the current known technology, the most commonly used method is still to use sulfuric acid to clean, but this method has the following disadvantages: high temperature process (120 ° C), large water consumption, large waste acid discharge, and inability to treat materials with metal layers, which is very difficult. Consumes resources and is not environmentally friendly

Method used

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  • Bubbling reaction cleaning device and method
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  • Bubbling reaction cleaning device and method

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Embodiment Construction

[0056] In order to have a further understanding of the purpose of the present invention, structural features and functions thereof, the accompanying drawings are described in detail as follows:

[0057] The present invention is a bubble reaction cleaning device, which uses bubble reaction to remove organic matter on the surface of a substrate. First, please refer to FIG. 1 , which is a schematic structural diagram of the bubble reaction cleaning device of the present invention.

[0058] The bubble type reaction cleaning device of the present invention comprises: reaction tank 10, motion unit 20, temperature control system 30, reaction liquid supply source 40, reaction gas supply source 50, pressure control system 60, bubble generation mechanism 70 and washing liquid supply The source 80 and the reaction tank 10 are used to accommodate the substrate 90, and provide a space for cleaning the substrate 90, while the substrate 90 is placed on the motion unit 20, and causes the subst...

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Abstract

The bubbling reaction cleaning set and method is based on bubble interface diffusion layer compressing technology. The pneumatically generated bubble wall is utilized as the reaction interface of the hetero gas-liquid-solid system. During the climbing and dragging course of the bubble along the surface of the material to be cleaned, the liquid-solid interface layer is compressed to optimize the interface mass transfer efficiency and to eliminate the organic pollutant in the material surface effectively.

Description

technical field [0001] The invention relates to a cleaning device, which is applied to remove organic matter on a specific material, in particular to a bubble reaction cleaning device and method using ozone. Background technique [0002] Heterogeneous reaction systems exist in various industries, such as catalytic reaction systems and long-film processes for high-end electronic components. How to improve the heterogeneous mass transfer efficiency of heterogeneous reaction systems in multiphase) is the focus of research and development of related process technologies. In the heterogeneous reaction system where gas-liquid-solid coexistence, since the reaction must be carried out through the interface layer of gas-liquid and liquid-solid phase, the thickness of the interface diffusion layer and The update frequency of the reaction interface has become a key bottleneck affecting the reaction rate. [0003] Generally, traditional technologies use operations such as mechanical st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/10B08B3/00B08B11/00
Inventor 金光祖陈秋美徐静怡郭詠琪
Owner IND TECH RES INST
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