Bubbling reaction cleaning device and method
A technology for cleaning devices and air bubbles, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., which can solve problems such as large water consumption, environmental protection, and inability to handle metal layer materials
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0056] In order to have a further understanding of the purpose of the present invention, structural features and functions thereof, the accompanying drawings are described in detail as follows:
[0057] The present invention is a bubble reaction cleaning device, which uses bubble reaction to remove organic matter on the surface of a substrate. First, please refer to FIG. 1 , which is a schematic structural diagram of the bubble reaction cleaning device of the present invention.
[0058] The bubble type reaction cleaning device of the present invention comprises: reaction tank 10, motion unit 20, temperature control system 30, reaction liquid supply source 40, reaction gas supply source 50, pressure control system 60, bubble generation mechanism 70 and washing liquid supply The source 80 and the reaction tank 10 are used to accommodate the substrate 90, and provide a space for cleaning the substrate 90, while the substrate 90 is placed on the motion unit 20, and causes the subst...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com