Material for conductor tracks made of copper alloy
A technology of wire material and copper alloy, applied in metal material coating process, semiconductor/solid-state device manufacturing, semiconductor device, etc.
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[0012] Copper powder with a particle size of 130 microns was mixed with the respective alloy powders in a diffusion mixer. The mixed powder is introduced into a container made of unalloyed steel, degassed, and the container is evacuated and sealed in an airtight manner.
[0013] The thermal compression was carried out in a HIP apparatus at a temperature of 100° C. to 200° C. below the respective solidus lines constituting the copper alloy and a pressure of 2000 bar. In all alloy variants, the density is greater than 98% of theoretical and the grain size is less than 500 microns. Three-dimensional is 300×150×10mm 3 The sputtering target and three-dimensional is 50 x 50 x 2mm 3 The oxidized samples were fabricated using a hot isostatic briquetting machine. Thereafter, each layer of 0.5 micron thickness is deposited on the glass substrate (liquid crystal display glass) by magnetron sputtering, and the adhesiveness of these layers is qualitatively measured and evaluated by tape...
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