Excimer lamp

Abstract

The invention provides an excimer lamp which can extend the lifetime of a lamp by preventing occurrence of cracks due to deterioration by ultraviolet rays on a quartz glass discharge container of an excimer lamp. A solvent containing an ultraviolet absorption substance is coated on the outside cylindrical face of an internal tube (1) made of quartz glass of an excimer lamp. By drying the solvent, a film of the ultraviolet absorption substance is formed, then, a heat treatment is applied with a temperature of 900 DEG C or more and softening point or less of the internal tube, thereby, the ultraviolet absorption substance is diffused inside the quartz glass from the outside cylindrical face of the internal tube. The film of the ultraviolet absorption substance is removed by performing hydrofluoric acid cleaning. The substance diffused is any one kind or more of Ti, Ce, Zr. The density of diffusion is thicker on the side closer to the discharge space. Since it prevents entering of ultraviolet rays into the internal tube (1), lifetime of the lamp can be extended.

Description

technical field [0001] The present invention relates to an excimer lamp, and more particularly, to an excimer lamp which prevents deterioration due to ultraviolet rays by diffusing an ultraviolet absorbing substance into quartz glass. Background technique [0002] In the conventional excimer lamp, short-wavelength ultraviolet rays emitted from the lamp degrade the discharge vessel made of quartz glass. Therefore, it is difficult to extend the life of the lamp. The lifetime of the excimer lamp has little to do with the consumption of parts such as electrodes, but has a lot to do with the deterioration of the discharge vessel made of quartz glass by ultraviolet rays generated by lamp discharge. That is, when short-wavelength ultraviolet rays are irradiated on the discharge vessel, the embrittlement of the quartz glass increases, and cracks occur in the discharge vessel early, resulting in non-lighting of the lamp and exhausting the life of the lamp. [0003] Various methods ...

AI Technical Summary

Problems solved by technology

The expansion coefficient and softening temperature of quartz glass mixed with ultraviolet absorbing material are different from the quartz glass of the main part of the discharge vessel, and the processing of the discharge vessel becomes difficult

In addition, in the method of coating the surface of quartz glass, impurities may be involved, and the coating film may peel off when the lamp is turned on, and the impurities and the peeled coating film may adversely affect the discharge.

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