Method for keeping optical etcher high speed synchronous control time sequence signal completeness
A signal integrity, high-speed synchronization technology, used in microlithography exposure equipment, photolithography process exposure devices, etc., to improve real-time process control, improve production efficiency, and improve reliability.
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[0034] The invention is a method for maintaining the integrity of the high-speed synchronous control timing signal of a lithography machine, and realizes the synchronous signal control of the exposure scan of a step-scan projection lithography machine. The present invention uses synchronous bus data transmission as a time reference, and strictly controls the time points of each signal through the minimum time unit of the synchronous bus, thereby realizing real-time and synchronization of signals between sub-modules.
[0035] The synchronous bus controller is the core controller of the synchronous control of the step-scan projection lithography machine. After all subsystems participating in the synchronous scanning process are negotiated under the exposure control software, the synchronous bus controller implements real-time synchronous control on the hardware of the entire scanning process.
[0036] The structural block diagram of the synchronous control process is as follows:...
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