Chip flame storage box

Abstract

The invention relates to a wafer frame storage box, for storing a wafer, comprising: a main body with a holding space; plural saliencies formed on the bottom surface of the holding space to reinforce the main body; plural shockproof components arranged in the bottom surface of the holding space; and a cover body integrated with the main body. In the course of carrying wafers, it can reduce the received external shock force and thus effectively reduce the wafer chipping ratio so as to save the manufacturing cost.

Description

technical field [0001] The invention relates to a wafer frame storage box, in particular to a wafer frame storage box which can reduce the wafer fragmentation rate. Background technique [0002] In the manufacture of semiconductors, many different processes are included. During the conversion between processes, it is inevitable to store and transport wafers. At this time, wafer storage boxes must be used to store wafers. [0003] see figure 1 , which is a schematic structural view of a known wafer storage box. The wafer storage box 11 is a plastic box for storing a plurality of wafers 12. The number of wafers 12 stored depends on the capacity of the wafer storage box 11. Only a sponge pad 13 is used as a gap between each wafer 12. If the wafer is stored in the wafer storage box 11 , static electricity will be generated due to the friction between the surface of the wafer 12 and the sponge pad 13 , thereby affecting the quality of the wafer 12 . In addition, in the process...

AI Technical Summary

Problems solved by technology

If the wafer is stored in the wafer storage box 11, static electricity will be generated due to the friction between the surface of the wafer 12 and the sponge pad 13, which will affect the quality of the wafer 12.

In addition, in the process of handling, it is easy to increase the fragmentation rate of the wafer 12 due to improper impact, and a lot of wafers 12 are wasted virtually, thus increasing the manufacturing cost

Images