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Evaporation source and steam plating device with evaporation source

An evaporation source and evaporation technology, which is applied in vacuum evaporation coating, lighting devices, electroluminescent light sources, etc., can solve the problems of increased production costs, prevent internal pollution, improve heat dissipation, and prevent interruption or interference Effect

Active Publication Date: 2006-06-07
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] In this way, the structural parts of the vapor deposition device are either damaged or damaged, and the parts must be replaced continuously, which increases the production cost.

Method used

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  • Evaporation source and steam plating device with evaporation source
  • Evaporation source and steam plating device with evaporation source
  • Evaporation source and steam plating device with evaporation source

Examples

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Embodiment Construction

[0072] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following embodiments are presented as examples in order to fully convey the idea of ​​the present invention to those skilled in the art. Therefore, the present invention is not limited to the following embodiments, and various modifications are possible. The lengths and thicknesses of layers and regions in the drawings may be exaggerated for clarity. The same reference signs in this specification denote the same structural elements.

[0073] figure 1 It is a perspective view showing the evaporation source of the first embodiment of the present invention.

[0074] Referring to the drawings, the evaporation source 100 constitutes an evaporation substance storage part, which is placed with evaporation substances and partially opened. Furthermore, a nozzle portion 30 having an opening A for spraying the vapor deposition substance is provided...

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Abstract

The invention provides an evaporation source and an evaporation device equipped with the evaporation source, which can effectively increase the heat of a nozzle by using a reflection plate, thereby preventing evaporation substances from condensing at the nozzle. The evaporation source of the present invention includes: an evaporating substance storage part, which is placed with an evaporating substance and has a partial opening; a nozzle part, which has a part connected to the opening of the evaporating substance storage part, and is used to spray the evaporating substance the opening part; the reflection plate, which surrounds at least a part of the corner of the nozzle part; the casing, which surrounds the vapor deposition substance storage part; the heating part, which is located between the casing and the vapor deposition substance between storage units. The vapor deposition device of the present invention includes the vaporization source. In addition, since the organic matter evaporation source of the present invention improves the material of the organic matter storage part and the nozzle part and attaches the organic matter leakage preventing parts on their surfaces, it improves the thermal conductivity of the nozzle part and the organic matter storage part, and prevents Organic spills.

Description

technical field [0001] The present invention relates to an evaporation source and an evaporation device equipped with the evaporation source, and more specifically relates to an evaporation source for evaporating organic substances or conductive substances on a large-area substrate and an evaporation device equipped with the evaporation source. Background technique [0002] An organic semiconductor device including an organic electroluminescent display device requires a step of forming an organic film. Since the substance to form the organic film is different whether it is a low molecular weight or a high molecular weight, the method of forming the film is also different. [0003] In the case of the polymer substance, the organic substance is dissolved in a solvent, and an organic film is formed using the dissolved organic substance. The organic film is formed using methods such as spin coating, dip coating, doctor blade, and inkjet printing. [0004] In the case of such a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/12C23C14/243H05B33/10H10K71/164H10K71/00
Inventor 安宰弘李星昊郑锡宪赵源锡康熙哲
Owner SAMSUNG DISPLAY CO LTD
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