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Technology of vacuum metal film plating on microparticle surface and its equipment

A technology of micro-particles and metal films, applied in metal material coating process, vacuum evaporation plating, sputtering plating, etc., can solve the problems of polluted environment operation procedures, uneven coating, poor compactness, etc., and achieve simple process, Exhaust gas pollution, water saving, high compactness effect

Inactive Publication Date: 2006-01-11
BEIHANG UNIV +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is no longer a problem to use electroless plating on the particle surface, but this method itself has its inherent shortcomings, such as uneven coating, poor compactness, high porosity, low purity, weak adhesion, polluting the environment, and complicated operating procedures, etc.

Method used

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  • Technology of vacuum metal film plating on microparticle surface and its equipment
  • Technology of vacuum metal film plating on microparticle surface and its equipment
  • Technology of vacuum metal film plating on microparticle surface and its equipment

Examples

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Embodiment Construction

[0030] Firstly, taking magnetron sputtering metallized copper film on the surface of inorganic hollow microspheres as a preferred embodiment, the process steps are described in detail as follows:

[0031] (1) Prepare the hollow microsphere particles;

[0032] (2) Open the vacuum chamber and place the metal copper or one of silver, aluminum, cobalt and nickel sputtering target on the sputtering target holder;

[0033] (3) install the sample dish loaded with hollow microbeads on the sample stage;

[0034] (4) Close the vacuum chamber, turn on the mechanical pump to evacuate to 1Pa~10Pa;

[0035] (5) Turn on the molecular pump to evacuate to 1.0×10 -3 Pa~8.0×10 -3 Pa;

[0036] (6) Turn on the flowmeter and fill the vacuum chamber with argon to 0.1Pa~10Pa;

[0037] (7) Turn on the ultrasonic vibrator or mechanical vibrator and the sample rack swing device, adjust the ultrasonic vibration power range: 10w ~ 200w, or the mechanical vibration power range: 5w ~ 5000w, the sample ...

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Abstract

A technology and equipment for the vacuum plating of metallic film on the surface of microparticles features that the specimen holder is connected with the plating equipment having ultrasonic or mechanical vibration generator. Said technology includes such steps as providing microparticles and sputtering metal target, fixing target and microparticle utensil, turning on mechanical pump for vacuumizing, turning on molecular pump for further vacuumizing, turning on ultrasonic or mechanical vibrator, regulating power, frequency and time, and sputtering.

Description

technical field [0001] The invention relates to a vacuum coating process and equipment thereof, in particular to a vacuum coating metal film process and equipment on the surface of microparticles. Background technique [0002] At present, compared with the bulk of the same material, the physical and chemical properties of microparticles have changed significantly, and they have excellent optical, electrical, magnetic, thermal, mechanical and chemical properties different from conventional materials. The microparticle surface film is a new type of material composed of a single layer or several layers of composite film coated on the surface of several different types of granular materials such as inorganic non-metallic, metal or organic polymers through a certain process. It can retain the main characteristics of the original component materials, and can obtain properties that the original components do not have through the composite effect. It can also make the properties of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/54
Inventor 沈志刚俞晓正徐政
Owner BEIHANG UNIV
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