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Roasting process for obtaining super high vacuum in vacuum system

A vacuum system and extremely high vacuum technology, applied in the field of vacuum system, can solve the problems of poor degassing efficiency, high energy consumption, long processing time, etc., and achieve the effect of improving vacuum degree

Inactive Publication Date: 2006-01-04
INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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Problems solved by technology

Therefore, the efficiency of degassing in the prior art is relatively poor, and in order to achieve the required effect, the corresponding processing time is longer, so the energy consumption produced is higher

Method used

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Examples

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Embodiment Construction

[0009] An example of the present invention is provided below.

[0010] This embodiment is an ultra-large and extremely high vacuum system for the cooling storage ring of the Lanzhou Heavy Ion Accelerator, with a system area of ​​160M 2 , the specific process is: heating rate: 0.50.5 ~ 2 ℃ / min; baking temperature: 250 ℃; holding time: 40 hours, cooling rate: 0.50.5 ~ 2 ℃ / min; temperature uniformity maintained at ± 5 ℃; the degassing current of the cathode of the gauge is 40mA, and the working current is 1.6mA; the degassing current of the cathode of the quadrupole mass spectrometer is 10mA, and the working current is 2mA, the degassing current of the titanium sublimation pump is 28A, and its working current is 48A, Sputtering ion pump applied voltage 7.5kV. After baking treatment, the surface degassing rate of the system material can reach ≤5×10 -11 Pa.l / s.cm 2 , system vacuum -10 Pa.

[0011] For the system with exactly the same conditions without using the baking proc...

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Abstract

The present invention relates to the pre-treatment process of making vacuum system obtain extremely high vacuum, say, superior to 10-9 Pa. The present invention is especially suitable for vacuum system with titanium sublimation pump, sputtering ion pump or turbine molecular pump. The technological process is one with electric heater to roast while pumping with titanium sublimation pump, sputtering ion pump or turbine molecular pump. The heating rate in roasting is 0.5-2 deg c / min, and the system is then maintained at 220-300 deg c for 40-50 hr before lowering the temperature at rate of 0.5-2 deg c / min and finishing the roasting operation.

Description

technical field [0001] The present invention relates to making the vacuum system obtain extremely high vacuum, such as obtaining a system vacuum degree better than 10 -9 Pa, the pretreatment process. The invention is particularly directed to vacuum systems using titanium sublimation pumps, sputter ion pumps and turbomolecular pumps for pumping. Background technique [0002] In order to obtain a high vacuum degree in the vacuum system, the system needs to be baked before the system works. Baking the system can make the gas molecules adsorbed on the surface obtain enough desorption energy and release them quickly. In the prior art, the electric heating device is placed in the system for baking, and at the same time, the exhaust equipment is operated, so that the vacuum system exposes various gas molecules in the atmosphere that are physically adsorbed on the inner surface of the system. released slowly. In the prior art, although the degassing treatment is carried out in t...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/56C23C14/34
Inventor 张军辉杨晓天胡振军张喜平蒙峻侯生军
Owner INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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