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Optical thin-membrane production of dispersion oxide from copper-silver nanometer particle

A technology of oxide thin films and nanoparticles, which is applied in the field of composite materials of metal nanoparticles and inorganic non-metallic materials, can solve the problem of no layered structure and achieve the effect of excellent nonlinear characteristics

Inactive Publication Date: 2005-12-28
UNIV OF SCI & TECH BEIJING
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Problems solved by technology

At present, there are relatively few reports on copper-silver composite nanoparticle-dispersed oxide films. The reports on copper-silver composite nanoparticle-dispersed oxide films are: G.De, M.Gusso, and L.Tapfer: OURNAL OF APPLIEDPHYSICS, 80[12](1998)6734~6739, they prepared Cu by sol-gel method 1 Ag 2 / SiO 2 dispersed film, at 5% H 2 ~95%N 2 In the atmosphere of 1000K, after 0.5h annealing treatment, spherical Ag and Cu mixed component particles were obtained, and two surface plasmon resonance absorption peaks were observed in the optical absorption spectrum; J.Gonzalo, D.Babonneau, and C.N.Afonso : JOURNAL OF APPLIED PHYSICS, 96[9](2004)5164~5168, they prepared CuAg / Al by pulsed laser deposition 2 o 3 Thin film, obtained Ag(Cu) or Cu(Ag) mixture particles with core-shell structure, only one surface plasmon resonance absorption peak can be observed in the wavelength range of 424-572 nanometers in the optical absorption spectrum, through Increasing the volume content of Cu particles found that the position of the absorption peak shifted blue; Goutam De: Journal of Sol-Gel Science and Technology, 11(1998) 289-298, they prepared CuAg / SiO by sol-gel method 2 thin film, a separate phase of metal particles was obtained, and two surface plasmon resonance absorption peaks were observed in the optical absorption spectrum, but the combination state and microstructure of Cu particles and Ag particles were not described in the paper; F.Ren, C.Z.Jiang, L. zhang, Y.Shi, J.B.Wang, R.H.Wang: Micro 35(2004)489~493, they prepared AgCu / SiO by ion implantation 2 Dispersed thin film, only one absorption peak appears between 420 and 580 nanometers in the light absorption spectrum, analysis indicates that Cu and Ag form alloy particles
In the above-mentioned literature, the metal multi-component particles in the film are all alloy particles or particles of mixed components, and there is no obvious layered structure between the two metals

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  • Optical thin-membrane production of dispersion oxide from copper-silver nanometer particle

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Embodiment Construction

[0012] Cu of the present invention x Ag 1-x / SiO 2 The copper-silver nanoparticle-dispersed oxide multilayer film of the system is composed of several layers or even hundreds of layers of copper-silver nano-metal particle layers and oxides. The diameter of copper-silver nanoparticles is 2-100 nanometers, and the thickness of the oxide layer is several nanometers. to tens of nanometers. figure 1 Schematic diagram of the nano-metal particle dispersed oxide multilayer film designed for the present invention. Wedge 1 is the substrate, wedges 2 and 3 are Cu or Ag nanoparticle layers, respectively, and wedge 4 is the oxide layer. The thin film is prepared by sputtering technique.

[0013] Its specific technological process is:

[0014] 1. Cu, Ag and SiO 2 The sputtering target has a diameter of 50mm and a purity of 99.99%.

[0015] 2. After the quartz substrate is ultrasonically cleaned in acetone for 5-10 minutes, put it into the sputtering chamber.

[0016] 3. The substrat...

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Abstract

An oxidation optical membrane of Kufil alloy nano-particle. Fit three sputtered targets of Cu, Ag and oxide in sputtered attachment. Flap is fit before sputtered targets and base body. Control alone capacity factor, argon flux of sputtered targets to obtain the product. Steps are as follow. First, prepare Cu, Ag nano-particle single layer membrane. Then cover oxide membrane on it. Repeat the two steps so that the membrane is between two oxide membranes. Nano-particle of Cu, Ag is purified metal, which make the membrane be with good optical property.

Description

technical field [0001] The invention belongs to the field of composite materials of metal nanoparticles and inorganic non-metallic materials, and in particular provides a method for preparing a copper-silver pure metal nanoparticle-dispersed oxide multilayer nonlinear optical film, which involves a variety of metal nanoparticle-dispersed oxides Design and preparation process of multilayer optical thin film materials. Background technique [0002] Nano-metal particles dispersed oxide films have excellent nonlinear optical properties. Because the surface effect and quantum size effect of metal nanoparticles are very significant, the metal particles interact with the surrounding oxide matrix, and the electrons and ions inside the metal particles are transferred to the interface. Up, a plasma is formed. Under the action of incident light, the phenomenon of surface plasmon resonance occurs, which selectively absorbs and transmits incident light waves. Functional thin films with...

Claims

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Application Information

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IPC IPC(8): C23C14/34
Inventor 张波萍焦力实刘玮书董燕王柯张雅茹
Owner UNIV OF SCI & TECH BEIJING
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