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Optical thin-membrane production of dispersion oxide from copper-golden nanometer particle

A technology of oxide thin film and nano particles, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of copper-gold dispersed oxide composite thin film system that have not been reported, and achieve excellent nonlinear characteristics Effect

Inactive Publication Date: 2005-12-28
UNIV OF SCI & TECH BEIJING
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Problems solved by technology

Moreover, the system of copper-gold dispersed oxide composite film has not been reported in all literatures.

Method used

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  • Optical thin-membrane production of dispersion oxide from copper-golden nanometer particle

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Embodiment Construction

[0013] Cu of the present invention x Au 1-x / SiO 2 The copper-gold nanoparticles dispersed oxide multilayer film of the system is composed of several layers or even hundreds of layers of copper-gold nano-metal particle layers and oxides. The diameter of copper-gold nanoparticles is 2-100 nanometers, and the thickness of the oxide layer is several nanometers. to tens of nanometers. figure 1 Schematic diagram of the nano-metal particle dispersed oxide multilayer film designed for the present invention. Wedge 1 is the substrate, wedges 2 and 3 are Cu or Au nanoparticle layers, respectively, and wedge 4 is the oxide layer. The thin film is prepared by sputtering technique.

[0014] Its specific technological process is:

[0015] 1. Cu, Au and SiO 2 The sputtering target has a diameter of 50mm and a purity of 99.99%.

[0016] 2. Clean the quartz substrate ultrasonically in acetone for 5-10 minutes, and then put it into the sputtering chamber.

[0017] 3. The substrate press...

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Abstract

An oxidation optical membrane of nioro alloy nano-particle. Fit three sputtered targets of Cu, Au and oxide in sputtered attachment. Flap is fit before sputtered targets and base body. Control alone capacity factor, argon flux of sputtered targets to obtain the product. Steps are as follow. First, prepare Cu, Au nano-particle single layer membrane. Then cover oxide membrane on it. Repeat the two steps so that the membrane is between two oxide membranes. Nano-particle of Cu, Au is purified metal, which make the membrane be with good optical property.

Description

technical field [0001] The invention belongs to the field of composite materials of metal nanoparticles and inorganic non-metallic materials, and in particular provides a design and preparation process of copper-gold pure metal nanoparticles dispersed oxide multilayer nonlinear optical film, which involves the dispersion of various metal nanoparticles Design and preparation process of oxide multilayer optical thin film materials. Background technique [0002] Due to the excellent nonlinear optical properties of nano-metal particle dispersed oxide films, it has recently attracted extensive attention. When the size of the metal particles is nanoscale, the surface effect and quantum size effect of the metal particles are very significant, and the metal particles interact with the surrounding oxide matrix, so that the electrons and ions inside the metal particles are transferred to the interface, forming a plasma body. Under the action of incident light, the surface plasmon re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34
Inventor 张波萍焦力实刘玮书董燕王柯张雅茹
Owner UNIV OF SCI & TECH BEIJING
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