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Purification continuous production process for high-purity hydrogen peroxide

A high-purity hydrogen peroxide, hydrogen peroxide technology, applied in the direction of peroxide/peroxyhydrate/peroxyacid/superoxide/ozone, inorganic chemistry, chemical instruments and methods, etc., can solve the problem of peroxide Problems such as low hydrogen utilization rate, unsatisfactory purity, and poor separation effect achieve the effect of small footprint, low production cost, and large output

Inactive Publication Date: 2005-11-23
李祥庆
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Problems solved by technology

Both have defects such as low utilization rate of raw material hydrogen peroxide, only 85%, high production cost, poor separation effect, and the purity cannot meet the requirements.
Can only meet the International Semiconductor Equipment and Materials Organization SEMI·C1·9-90 and SEMI·C7·5-93 standards

Method used

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  • Purification continuous production process for high-purity hydrogen peroxide

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Embodiment Construction

[0014] Such as figure 1 , the present invention is a continuous production process for the purification of high-purity hydrogen peroxide and its purification device. It uses a pump to input the raw material containing industrial-grade hydrogen peroxide into a macroporous adsorption resin column for adsorption of organic carbon, and then The hydrogen peroxide that removes organic carbon is input into the anion-cation single ion exchange resin column for ion exchange in turn, and then the anion-cation exchanged hydrogen peroxide is input into the anion-cation exchange resin mixed column, and the ion exchange is performed again to remove harmful ion impurities, and finally the The above hydrogen peroxide input 0.1 μm? ~? Polyvinylidene fluoride microporous filter with a certain pore size to remove particulate impurities, so as to obtain high-purity hydrogen peroxide products that meet the requirements.

[0015] Such as figure 1 The high-purity hydrogen peroxide continuous puri...

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Abstract

The invention relates to a purification continuous production process for high-purity hydrogen peroxide, which comprises preparing technical grade hydrogen peroxide raw material, feeding into macroporous adsorption resin column through pumps, carrying out organic carbon adsorption, feeding hydrogen peroxide into separate anion and cation exchange resin columns for ion exchange, inputting the hydrogen peroxide into anionic and cationic ion-exchange resin mixing column, carrying out ion exchange again, removing detrimental ionic impurities, inputting into polyvinylidene fluoride microfilter with a bore diameter of 0.05um to 0.1um, to as to remove the impurity substance.

Description

Technical field: [0001] The invention relates to a purification continuous production process for producing high-purity hydrogen peroxide. High-purity hydrogen peroxide is mainly suitable for corrosion and cleaning in the electronics industry to manufacture integrated circuit semiconductor devices. Also used in food, medicine and other industries. Background technique: [0002] At present, there are two methods for industrialized purification of hydrogen peroxide: the one is to use organic carbon adsorption plus anion-cation exchange method, such as CN1285311A, which is to import the raw material hydrogen peroxide into the adsorption resin column through a pump to absorb organic carbon, and then remove The hydrogen peroxide of organic carbon is input into the anion-cation exchange resin column for ion exchange, and then the ion-exchanged hydrogen peroxide is input into the filter to remove particulate impurities, so as to obtain ultra-pure hydrogen peroxide products. The s...

Claims

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Application Information

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IPC IPC(8): C01B15/013
Inventor 李祥庆
Owner 李祥庆
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